5/10/2011	9:26:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	9:26:26 AM	Recipe started at 9:26 AM
5/10/2011	9:26:26 AM	H2 valve closed
5/10/2011	9:26:26 AM	BCl3 valve closed
5/10/2011	9:26:26 AM	PH3 valve closed
5/10/2011	9:26:26 AM	SiCl4 pre valve closed
5/10/2011	9:26:26 AM	SiCl4 post valve closed
5/10/2011	9:26:26 AM	Main Vac valve closed
5/10/2011	9:26:26 AM	Bypass valve closed
5/10/2011	9:26:26 AM	Bubbler valve closed
5/10/2011	9:26:26 AM	Helium valve opened
5/10/2011	9:26:26 AM	Helium MFC set to  500.000000
5/10/2011	9:26:26 AM	H2 MFC set to  0.000000
5/10/2011	9:26:26 AM	BCl3 MFC set to  0.000000
5/10/2011	9:26:26 AM	PHl3 MFC set to  0.000000
5/10/2011	9:26:26 AM	SiCl4 MFC set to  0.000000
5/10/2011	9:26:26 AM	Bypass solenoid MFC set to  0.000000
5/10/2011	9:26:27 AM	Tube furnace set to 0
5/10/2011	9:27:44 AM	Helium valve closed
5/10/2011	9:27:44 AM	H2 valve closed
5/10/2011	9:27:44 AM	BCl3 valve closed
5/10/2011	9:27:44 AM	PH3 valve closed
5/10/2011	9:27:44 AM	SiCl4 pre valve closed
5/10/2011	9:27:44 AM	SiCl4 post valve closed
5/10/2011	9:27:44 AM	Main Vac valve closed
5/10/2011	9:27:44 AM	Bypass valve closed
5/10/2011	9:27:44 AM	Bubbler valve closed
5/10/2011	9:27:44 AM	Helium MFC set to  0.000000
5/10/2011	9:27:44 AM	H2 MFC set to  0.000000
5/10/2011	9:27:44 AM	BCl3 MFC set to  0.000000
5/10/2011	9:27:44 AM	PHl3 MFC set to  0.000000
5/10/2011	9:27:44 AM	SiCl4 MFC set to  0.000000
5/10/2011	9:27:44 AM	Bypass solenoid MFC set to  0.000000
5/10/2011	9:27:44 AM	Tube furnace set to 0
5/10/2011	9:27:44 AM	Run finished at 9:27 AM
5/10/2011	9:27:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	1:47:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	1:47:33 PM	Recipe started at 1:47 PM
5/10/2011	1:47:33 PM	Helium valve closed
5/10/2011	1:47:33 PM	H2 valve closed
5/10/2011	1:47:33 PM	BCl3 valve closed
5/10/2011	1:47:33 PM	PH3 valve closed
5/10/2011	1:47:33 PM	SiCl4 pre valve closed
5/10/2011	1:47:33 PM	SiCl4 post valve closed
5/10/2011	1:47:33 PM	Main Vac valve closed
5/10/2011	1:47:33 PM	Bubbler valve closed
5/10/2011	1:47:33 PM	Bypass valve opened
5/10/2011	1:47:33 PM	Helium MFC set to  0.000000
5/10/2011	1:47:33 PM	H2 MFC set to  0.000000
5/10/2011	1:47:33 PM	BCl3 MFC set to  0.000000
5/10/2011	1:47:33 PM	PHl3 MFC set to  0.000000
5/10/2011	1:47:33 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:47:33 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:47:33 PM	Tube furnace set to 0
5/10/2011	1:48:10 PM	Helium valve closed
5/10/2011	1:48:10 PM	H2 valve closed
5/10/2011	1:48:10 PM	BCl3 valve closed
5/10/2011	1:48:10 PM	PH3 valve closed
5/10/2011	1:48:10 PM	SiCl4 pre valve closed
5/10/2011	1:48:10 PM	SiCl4 post valve closed
5/10/2011	1:48:10 PM	Bubbler valve closed
5/10/2011	1:48:10 PM	Main Vac valve opened
5/10/2011	1:48:10 PM	Bypass valve opened
5/10/2011	1:48:10 PM	Helium MFC set to  0.000000
5/10/2011	1:48:10 PM	H2 MFC set to  0.000000
5/10/2011	1:48:10 PM	BCl3 MFC set to  0.000000
5/10/2011	1:48:10 PM	PHl3 MFC set to  0.000000
5/10/2011	1:48:10 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:48:10 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:48:10 PM	Tube furnace set to 0
5/10/2011	1:48:10 PM	Run finished at 1:48 PM
5/10/2011	1:48:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	1:51:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	1:51:53 PM	Recipe started at 1:51 PM
5/10/2011	1:51:53 PM	Helium valve closed
5/10/2011	1:51:53 PM	H2 valve closed
5/10/2011	1:51:53 PM	BCl3 valve closed
5/10/2011	1:51:53 PM	PH3 valve closed
5/10/2011	1:51:53 PM	SiCl4 pre valve closed
5/10/2011	1:51:53 PM	SiCl4 post valve closed
5/10/2011	1:51:53 PM	Main Vac valve closed
5/10/2011	1:51:53 PM	Bubbler valve closed
5/10/2011	1:51:53 PM	Bypass valve opened
5/10/2011	1:51:53 PM	Helium MFC set to  0.000000
5/10/2011	1:51:53 PM	H2 MFC set to  0.000000
5/10/2011	1:51:53 PM	BCl3 MFC set to  0.000000
5/10/2011	1:51:53 PM	PHl3 MFC set to  0.000000
5/10/2011	1:51:53 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:51:53 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:51:53 PM	Tube furnace set to 0
5/10/2011	1:51:53 PM	Helium valve closed
5/10/2011	1:51:53 PM	H2 valve closed
5/10/2011	1:51:53 PM	BCl3 valve closed
5/10/2011	1:51:53 PM	PH3 valve closed
5/10/2011	1:51:53 PM	SiCl4 pre valve closed
5/10/2011	1:51:53 PM	SiCl4 post valve closed
5/10/2011	1:51:53 PM	Bubbler valve closed
5/10/2011	1:51:53 PM	Main Vac valve opened
5/10/2011	1:51:53 PM	Bypass valve opened
5/10/2011	1:51:53 PM	Helium MFC set to  0.000000
5/10/2011	1:51:53 PM	H2 MFC set to  0.000000
5/10/2011	1:51:53 PM	BCl3 MFC set to  0.000000
5/10/2011	1:51:53 PM	PHl3 MFC set to  0.000000
5/10/2011	1:51:53 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:51:53 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:51:53 PM	Tube furnace set to 0
5/10/2011	1:52:53 PM	H2 valve closed
5/10/2011	1:52:53 PM	BCl3 valve closed
5/10/2011	1:52:53 PM	PH3 valve closed
5/10/2011	1:52:53 PM	SiCl4 pre valve closed
5/10/2011	1:52:53 PM	SiCl4 post valve closed
5/10/2011	1:52:53 PM	Bubbler valve closed
5/10/2011	1:52:53 PM	Helium valve opened
5/10/2011	1:52:53 PM	Main Vac valve opened
5/10/2011	1:52:53 PM	Bypass valve opened
5/10/2011	1:52:53 PM	Helium MFC set to  100.000000
5/10/2011	1:52:53 PM	H2 MFC set to  0.000000
5/10/2011	1:52:53 PM	BCl3 MFC set to  0.000000
5/10/2011	1:52:53 PM	PHl3 MFC set to  0.000000
5/10/2011	1:52:53 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:52:53 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:52:54 PM	Tube furnace set to 0
5/10/2011	1:53:54 PM	Helium valve closed
5/10/2011	1:53:54 PM	H2 valve closed
5/10/2011	1:53:54 PM	BCl3 valve closed
5/10/2011	1:53:54 PM	PH3 valve closed
5/10/2011	1:53:54 PM	SiCl4 pre valve closed
5/10/2011	1:53:54 PM	SiCl4 post valve closed
5/10/2011	1:53:54 PM	Bubbler valve closed
5/10/2011	1:53:54 PM	Main Vac valve opened
5/10/2011	1:53:54 PM	Bypass valve opened
5/10/2011	1:53:54 PM	Helium MFC set to  0.000000
5/10/2011	1:53:54 PM	H2 MFC set to  0.000000
5/10/2011	1:53:54 PM	BCl3 MFC set to  0.000000
5/10/2011	1:53:54 PM	PHl3 MFC set to  0.000000
5/10/2011	1:53:54 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:53:54 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:53:54 PM	Tube furnace set to 0
5/10/2011	1:54:54 PM	H2 valve closed
5/10/2011	1:54:54 PM	BCl3 valve closed
5/10/2011	1:54:54 PM	PH3 valve closed
5/10/2011	1:54:54 PM	SiCl4 pre valve closed
5/10/2011	1:54:54 PM	SiCl4 post valve closed
5/10/2011	1:54:54 PM	Bubbler valve closed
5/10/2011	1:54:54 PM	Helium valve opened
5/10/2011	1:54:54 PM	Main Vac valve opened
5/10/2011	1:54:54 PM	Bypass valve opened
5/10/2011	1:54:54 PM	Helium MFC set to  100.000000
5/10/2011	1:54:54 PM	H2 MFC set to  0.000000
5/10/2011	1:54:54 PM	BCl3 MFC set to  0.000000
5/10/2011	1:54:54 PM	PHl3 MFC set to  0.000000
5/10/2011	1:54:54 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:54:54 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:54:54 PM	Tube furnace set to 0
5/10/2011	1:55:54 PM	Helium valve closed
5/10/2011	1:55:54 PM	H2 valve closed
5/10/2011	1:55:54 PM	BCl3 valve closed
5/10/2011	1:55:54 PM	PH3 valve closed
5/10/2011	1:55:54 PM	SiCl4 pre valve closed
5/10/2011	1:55:54 PM	SiCl4 post valve closed
5/10/2011	1:55:54 PM	Bubbler valve closed
5/10/2011	1:55:54 PM	Main Vac valve opened
5/10/2011	1:55:54 PM	Bypass valve opened
5/10/2011	1:55:54 PM	Helium MFC set to  0.000000
5/10/2011	1:55:54 PM	H2 MFC set to  0.000000
5/10/2011	1:55:54 PM	BCl3 MFC set to  0.000000
5/10/2011	1:55:54 PM	PHl3 MFC set to  0.000000
5/10/2011	1:55:54 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:55:54 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:55:54 PM	Tube furnace set to 0
5/10/2011	1:56:54 PM	H2 valve closed
5/10/2011	1:56:54 PM	BCl3 valve closed
5/10/2011	1:56:54 PM	PH3 valve closed
5/10/2011	1:56:54 PM	SiCl4 pre valve closed
5/10/2011	1:56:54 PM	SiCl4 post valve closed
5/10/2011	1:56:54 PM	Bubbler valve closed
5/10/2011	1:56:54 PM	Helium valve opened
5/10/2011	1:56:54 PM	Main Vac valve opened
5/10/2011	1:56:54 PM	Bypass valve opened
5/10/2011	1:56:54 PM	Helium MFC set to  100.000000
5/10/2011	1:56:54 PM	H2 MFC set to  0.000000
5/10/2011	1:56:54 PM	BCl3 MFC set to  0.000000
5/10/2011	1:56:54 PM	PHl3 MFC set to  0.000000
5/10/2011	1:56:54 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:56:54 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:56:54 PM	Tube furnace set to 0
5/10/2011	1:57:54 PM	Helium valve closed
5/10/2011	1:57:54 PM	H2 valve closed
5/10/2011	1:57:54 PM	BCl3 valve closed
5/10/2011	1:57:54 PM	PH3 valve closed
5/10/2011	1:57:54 PM	SiCl4 pre valve closed
5/10/2011	1:57:54 PM	SiCl4 post valve closed
5/10/2011	1:57:54 PM	Bubbler valve closed
5/10/2011	1:57:54 PM	Main Vac valve opened
5/10/2011	1:57:54 PM	Bypass valve opened
5/10/2011	1:57:54 PM	Helium MFC set to  0.000000
5/10/2011	1:57:54 PM	H2 MFC set to  0.000000
5/10/2011	1:57:54 PM	BCl3 MFC set to  0.000000
5/10/2011	1:57:54 PM	PHl3 MFC set to  0.000000
5/10/2011	1:57:54 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:57:54 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:57:55 PM	Tube furnace set to 0
5/10/2011	1:58:55 PM	H2 valve closed
5/10/2011	1:58:55 PM	BCl3 valve closed
5/10/2011	1:58:55 PM	PH3 valve closed
5/10/2011	1:58:55 PM	SiCl4 pre valve closed
5/10/2011	1:58:55 PM	SiCl4 post valve closed
5/10/2011	1:58:55 PM	Bubbler valve closed
5/10/2011	1:58:55 PM	Helium valve opened
5/10/2011	1:58:55 PM	Main Vac valve opened
5/10/2011	1:58:55 PM	Bypass valve opened
5/10/2011	1:58:55 PM	Helium MFC set to  100.000000
5/10/2011	1:58:55 PM	H2 MFC set to  0.000000
5/10/2011	1:58:55 PM	BCl3 MFC set to  0.000000
5/10/2011	1:58:55 PM	PHl3 MFC set to  0.000000
5/10/2011	1:58:55 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:58:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:58:55 PM	Tube furnace set to 0
5/10/2011	1:59:55 PM	Helium valve closed
5/10/2011	1:59:55 PM	H2 valve closed
5/10/2011	1:59:55 PM	BCl3 valve closed
5/10/2011	1:59:55 PM	PH3 valve closed
5/10/2011	1:59:55 PM	SiCl4 pre valve closed
5/10/2011	1:59:55 PM	SiCl4 post valve closed
5/10/2011	1:59:55 PM	Bubbler valve closed
5/10/2011	1:59:55 PM	Main Vac valve opened
5/10/2011	1:59:55 PM	Bypass valve opened
5/10/2011	1:59:55 PM	Helium MFC set to  0.000000
5/10/2011	1:59:55 PM	H2 MFC set to  0.000000
5/10/2011	1:59:55 PM	BCl3 MFC set to  0.000000
5/10/2011	1:59:55 PM	PHl3 MFC set to  0.000000
5/10/2011	1:59:55 PM	SiCl4 MFC set to  0.000000
5/10/2011	1:59:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	1:59:55 PM	Tube furnace set to 0
5/10/2011	2:00:55 PM	H2 valve closed
5/10/2011	2:00:55 PM	BCl3 valve closed
5/10/2011	2:00:55 PM	PH3 valve closed
5/10/2011	2:00:55 PM	SiCl4 pre valve closed
5/10/2011	2:00:55 PM	SiCl4 post valve closed
5/10/2011	2:00:55 PM	Bubbler valve closed
5/10/2011	2:00:55 PM	Helium valve opened
5/10/2011	2:00:55 PM	Main Vac valve opened
5/10/2011	2:00:55 PM	Bypass valve opened
5/10/2011	2:00:55 PM	Helium MFC set to  100.000000
5/10/2011	2:00:55 PM	H2 MFC set to  0.000000
5/10/2011	2:00:55 PM	BCl3 MFC set to  0.000000
5/10/2011	2:00:55 PM	PHl3 MFC set to  0.000000
5/10/2011	2:00:55 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:00:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:00:55 PM	Tube furnace set to 0
5/10/2011	2:01:55 PM	Helium valve closed
5/10/2011	2:01:55 PM	H2 valve closed
5/10/2011	2:01:55 PM	BCl3 valve closed
5/10/2011	2:01:55 PM	PH3 valve closed
5/10/2011	2:01:55 PM	SiCl4 pre valve closed
5/10/2011	2:01:55 PM	SiCl4 post valve closed
5/10/2011	2:01:55 PM	Bubbler valve closed
5/10/2011	2:01:55 PM	Main Vac valve opened
5/10/2011	2:01:55 PM	Bypass valve opened
5/10/2011	2:01:55 PM	Helium MFC set to  0.000000
5/10/2011	2:01:55 PM	H2 MFC set to  0.000000
5/10/2011	2:01:55 PM	BCl3 MFC set to  0.000000
5/10/2011	2:01:55 PM	PHl3 MFC set to  0.000000
5/10/2011	2:01:55 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:01:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:01:56 PM	Tube furnace set to 0
5/10/2011	2:02:56 PM	H2 valve closed
5/10/2011	2:02:56 PM	BCl3 valve closed
5/10/2011	2:02:56 PM	PH3 valve closed
5/10/2011	2:02:56 PM	SiCl4 pre valve closed
5/10/2011	2:02:56 PM	SiCl4 post valve closed
5/10/2011	2:02:56 PM	Bubbler valve closed
5/10/2011	2:02:56 PM	Helium valve opened
5/10/2011	2:02:56 PM	Main Vac valve opened
5/10/2011	2:02:56 PM	Bypass valve opened
5/10/2011	2:02:56 PM	Helium MFC set to  100.000000
5/10/2011	2:02:56 PM	H2 MFC set to  0.000000
5/10/2011	2:02:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:02:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:02:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:02:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:02:56 PM	Tube furnace set to 0
5/10/2011	2:03:56 PM	Helium valve closed
5/10/2011	2:03:56 PM	H2 valve closed
5/10/2011	2:03:56 PM	BCl3 valve closed
5/10/2011	2:03:56 PM	PH3 valve closed
5/10/2011	2:03:56 PM	SiCl4 pre valve closed
5/10/2011	2:03:56 PM	SiCl4 post valve closed
5/10/2011	2:03:56 PM	Bubbler valve closed
5/10/2011	2:03:56 PM	Main Vac valve opened
5/10/2011	2:03:56 PM	Bypass valve opened
5/10/2011	2:03:56 PM	Helium MFC set to  0.000000
5/10/2011	2:03:56 PM	H2 MFC set to  0.000000
5/10/2011	2:03:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:03:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:03:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:03:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:03:56 PM	Tube furnace set to 0
5/10/2011	2:04:56 PM	H2 valve closed
5/10/2011	2:04:56 PM	BCl3 valve closed
5/10/2011	2:04:56 PM	PH3 valve closed
5/10/2011	2:04:56 PM	SiCl4 pre valve closed
5/10/2011	2:04:56 PM	SiCl4 post valve closed
5/10/2011	2:04:56 PM	Bubbler valve closed
5/10/2011	2:04:56 PM	Helium valve opened
5/10/2011	2:04:56 PM	Main Vac valve opened
5/10/2011	2:04:56 PM	Bypass valve opened
5/10/2011	2:04:56 PM	Helium MFC set to  100.000000
5/10/2011	2:04:56 PM	H2 MFC set to  0.000000
5/10/2011	2:04:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:04:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:04:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:04:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:04:56 PM	Tube furnace set to 0
5/10/2011	2:05:56 PM	Helium valve closed
5/10/2011	2:05:56 PM	H2 valve closed
5/10/2011	2:05:56 PM	BCl3 valve closed
5/10/2011	2:05:56 PM	PH3 valve closed
5/10/2011	2:05:56 PM	SiCl4 pre valve closed
5/10/2011	2:05:56 PM	SiCl4 post valve closed
5/10/2011	2:05:56 PM	Bubbler valve closed
5/10/2011	2:05:56 PM	Main Vac valve opened
5/10/2011	2:05:56 PM	Bypass valve opened
5/10/2011	2:05:56 PM	Helium MFC set to  0.000000
5/10/2011	2:05:56 PM	H2 MFC set to  0.000000
5/10/2011	2:05:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:05:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:05:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:05:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:05:56 PM	Tube furnace set to 0
5/10/2011	2:06:56 PM	H2 valve closed
5/10/2011	2:06:56 PM	BCl3 valve closed
5/10/2011	2:06:56 PM	PH3 valve closed
5/10/2011	2:06:56 PM	SiCl4 pre valve closed
5/10/2011	2:06:56 PM	SiCl4 post valve closed
5/10/2011	2:06:56 PM	Bubbler valve closed
5/10/2011	2:06:56 PM	Helium valve opened
5/10/2011	2:06:56 PM	Main Vac valve opened
5/10/2011	2:06:56 PM	Bypass valve opened
5/10/2011	2:06:56 PM	Helium MFC set to  100.000000
5/10/2011	2:06:56 PM	H2 MFC set to  0.000000
5/10/2011	2:06:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:06:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:06:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:06:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:06:57 PM	Tube furnace set to 0
5/10/2011	2:07:57 PM	Helium valve closed
5/10/2011	2:07:57 PM	H2 valve closed
5/10/2011	2:07:57 PM	BCl3 valve closed
5/10/2011	2:07:57 PM	PH3 valve closed
5/10/2011	2:07:57 PM	SiCl4 pre valve closed
5/10/2011	2:07:57 PM	SiCl4 post valve closed
5/10/2011	2:07:57 PM	Bubbler valve closed
5/10/2011	2:07:57 PM	Main Vac valve opened
5/10/2011	2:07:57 PM	Bypass valve opened
5/10/2011	2:07:57 PM	Helium MFC set to  0.000000
5/10/2011	2:07:57 PM	H2 MFC set to  0.000000
5/10/2011	2:07:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:07:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:07:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:07:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:07:57 PM	Tube furnace set to 0
5/10/2011	2:08:57 PM	H2 valve closed
5/10/2011	2:08:57 PM	BCl3 valve closed
5/10/2011	2:08:57 PM	PH3 valve closed
5/10/2011	2:08:57 PM	SiCl4 pre valve closed
5/10/2011	2:08:57 PM	SiCl4 post valve closed
5/10/2011	2:08:57 PM	Bubbler valve closed
5/10/2011	2:08:57 PM	Helium valve opened
5/10/2011	2:08:57 PM	Main Vac valve opened
5/10/2011	2:08:57 PM	Bypass valve opened
5/10/2011	2:08:57 PM	Helium MFC set to  100.000000
5/10/2011	2:08:57 PM	H2 MFC set to  0.000000
5/10/2011	2:08:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:08:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:08:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:08:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:08:57 PM	Tube furnace set to 0
5/10/2011	2:09:57 PM	Helium valve closed
5/10/2011	2:09:57 PM	H2 valve closed
5/10/2011	2:09:57 PM	BCl3 valve closed
5/10/2011	2:09:57 PM	PH3 valve closed
5/10/2011	2:09:57 PM	SiCl4 pre valve closed
5/10/2011	2:09:57 PM	SiCl4 post valve closed
5/10/2011	2:09:57 PM	Bubbler valve closed
5/10/2011	2:09:57 PM	Main Vac valve opened
5/10/2011	2:09:57 PM	Bypass valve opened
5/10/2011	2:09:57 PM	Helium MFC set to  0.000000
5/10/2011	2:09:57 PM	H2 MFC set to  0.000000
5/10/2011	2:09:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:09:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:09:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:09:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:09:57 PM	Tube furnace set to 0
5/10/2011	2:10:57 PM	H2 valve closed
5/10/2011	2:10:57 PM	BCl3 valve closed
5/10/2011	2:10:57 PM	PH3 valve closed
5/10/2011	2:10:57 PM	SiCl4 pre valve closed
5/10/2011	2:10:57 PM	SiCl4 post valve closed
5/10/2011	2:10:57 PM	Bubbler valve closed
5/10/2011	2:10:57 PM	Helium valve opened
5/10/2011	2:10:57 PM	Main Vac valve opened
5/10/2011	2:10:57 PM	Bypass valve opened
5/10/2011	2:10:57 PM	Helium MFC set to  100.000000
5/10/2011	2:10:57 PM	H2 MFC set to  0.000000
5/10/2011	2:10:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:10:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:10:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:10:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:10:57 PM	Tube furnace set to 0
5/10/2011	2:11:57 PM	Helium valve closed
5/10/2011	2:11:57 PM	H2 valve closed
5/10/2011	2:11:57 PM	BCl3 valve closed
5/10/2011	2:11:57 PM	PH3 valve closed
5/10/2011	2:11:57 PM	SiCl4 pre valve closed
5/10/2011	2:11:57 PM	SiCl4 post valve closed
5/10/2011	2:11:57 PM	Bubbler valve closed
5/10/2011	2:11:57 PM	Main Vac valve opened
5/10/2011	2:11:57 PM	Bypass valve opened
5/10/2011	2:11:57 PM	Helium MFC set to  0.000000
5/10/2011	2:11:57 PM	H2 MFC set to  0.000000
5/10/2011	2:11:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:11:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:11:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:11:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:11:58 PM	Tube furnace set to 0
5/10/2011	2:11:59 PM	Run finished at 2:11 PM
5/10/2011	2:11:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	2:27:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	2:27:58 PM	Recipe started at 2:27 PM
5/10/2011	2:27:59 PM	H2 valve closed
5/10/2011	2:27:59 PM	BCl3 valve closed
5/10/2011	2:27:59 PM	PH3 valve closed
5/10/2011	2:27:59 PM	SiCl4 pre valve closed
5/10/2011	2:27:59 PM	SiCl4 post valve closed
5/10/2011	2:27:59 PM	Main Vac valve closed
5/10/2011	2:27:59 PM	Bypass valve closed
5/10/2011	2:27:59 PM	Bubbler valve closed
5/10/2011	2:27:59 PM	Helium valve opened
5/10/2011	2:27:59 PM	Helium MFC set to  500.000000
5/10/2011	2:27:59 PM	H2 MFC set to  0.000000
5/10/2011	2:27:59 PM	BCl3 MFC set to  0.000000
5/10/2011	2:27:59 PM	PHl3 MFC set to  0.000000
5/10/2011	2:27:59 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:27:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:27:59 PM	Tube furnace set to 0
5/10/2011	2:28:15 PM	Helium valve closed
5/10/2011	2:28:15 PM	H2 valve closed
5/10/2011	2:28:15 PM	BCl3 valve closed
5/10/2011	2:28:15 PM	PH3 valve closed
5/10/2011	2:28:15 PM	SiCl4 pre valve closed
5/10/2011	2:28:15 PM	SiCl4 post valve closed
5/10/2011	2:28:15 PM	Main Vac valve closed
5/10/2011	2:28:15 PM	Bypass valve closed
5/10/2011	2:28:15 PM	Bubbler valve closed
5/10/2011	2:28:15 PM	Helium MFC set to  0.000000
5/10/2011	2:28:15 PM	H2 MFC set to  0.000000
5/10/2011	2:28:15 PM	BCl3 MFC set to  0.000000
5/10/2011	2:28:15 PM	PHl3 MFC set to  0.000000
5/10/2011	2:28:15 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:28:15 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:28:15 PM	Tube furnace set to 0
5/10/2011	2:28:15 PM	Run finished at 2:28 PM
5/10/2011	2:28:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	2:28:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	2:28:18 PM	Recipe started at 2:28 PM
5/10/2011	2:28:18 PM	Helium valve closed
5/10/2011	2:28:18 PM	H2 valve closed
5/10/2011	2:28:18 PM	BCl3 valve closed
5/10/2011	2:28:18 PM	PH3 valve closed
5/10/2011	2:28:18 PM	SiCl4 pre valve closed
5/10/2011	2:28:18 PM	SiCl4 post valve closed
5/10/2011	2:28:18 PM	Main Vac valve closed
5/10/2011	2:28:18 PM	Bubbler valve closed
5/10/2011	2:28:18 PM	Bypass valve opened
5/10/2011	2:28:18 PM	Helium MFC set to  0.000000
5/10/2011	2:28:18 PM	H2 MFC set to  0.000000
5/10/2011	2:28:18 PM	BCl3 MFC set to  0.000000
5/10/2011	2:28:18 PM	PHl3 MFC set to  0.000000
5/10/2011	2:28:18 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:28:18 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:28:18 PM	Tube furnace set to 0
5/10/2011	2:28:30 PM	Helium valve closed
5/10/2011	2:28:30 PM	H2 valve closed
5/10/2011	2:28:30 PM	BCl3 valve closed
5/10/2011	2:28:30 PM	PH3 valve closed
5/10/2011	2:28:30 PM	SiCl4 pre valve closed
5/10/2011	2:28:30 PM	SiCl4 post valve closed
5/10/2011	2:28:30 PM	Bubbler valve closed
5/10/2011	2:28:30 PM	Main Vac valve opened
5/10/2011	2:28:30 PM	Bypass valve opened
5/10/2011	2:28:30 PM	Helium MFC set to  0.000000
5/10/2011	2:28:30 PM	H2 MFC set to  0.000000
5/10/2011	2:28:30 PM	BCl3 MFC set to  0.000000
5/10/2011	2:28:30 PM	PHl3 MFC set to  0.000000
5/10/2011	2:28:30 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:28:30 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:28:31 PM	Tube furnace set to 0
5/10/2011	2:28:31 PM	Run finished at 2:28 PM
5/10/2011	2:28:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	2:29:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	2:29:55 PM	Recipe started at 2:29 PM
5/10/2011	2:29:55 PM	Helium valve closed
5/10/2011	2:29:55 PM	H2 valve closed
5/10/2011	2:29:55 PM	BCl3 valve closed
5/10/2011	2:29:55 PM	PH3 valve closed
5/10/2011	2:29:55 PM	SiCl4 pre valve closed
5/10/2011	2:29:55 PM	SiCl4 post valve closed
5/10/2011	2:29:55 PM	Main Vac valve closed
5/10/2011	2:29:55 PM	Bubbler valve closed
5/10/2011	2:29:55 PM	Bypass valve opened
5/10/2011	2:29:55 PM	Helium MFC set to  0.000000
5/10/2011	2:29:55 PM	H2 MFC set to  0.000000
5/10/2011	2:29:55 PM	BCl3 MFC set to  0.000000
5/10/2011	2:29:55 PM	PHl3 MFC set to  0.000000
5/10/2011	2:29:55 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:29:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:29:55 PM	Tube furnace set to 0
5/10/2011	2:29:55 PM	Helium valve closed
5/10/2011	2:29:55 PM	H2 valve closed
5/10/2011	2:29:55 PM	BCl3 valve closed
5/10/2011	2:29:55 PM	PH3 valve closed
5/10/2011	2:29:55 PM	SiCl4 pre valve closed
5/10/2011	2:29:55 PM	SiCl4 post valve closed
5/10/2011	2:29:55 PM	Bubbler valve closed
5/10/2011	2:29:55 PM	Main Vac valve opened
5/10/2011	2:29:55 PM	Bypass valve opened
5/10/2011	2:29:55 PM	Helium MFC set to  0.000000
5/10/2011	2:29:55 PM	H2 MFC set to  0.000000
5/10/2011	2:29:55 PM	BCl3 MFC set to  0.000000
5/10/2011	2:29:55 PM	PHl3 MFC set to  0.000000
5/10/2011	2:29:55 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:29:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:29:56 PM	Tube furnace set to 0
5/10/2011	2:30:56 PM	H2 valve closed
5/10/2011	2:30:56 PM	BCl3 valve closed
5/10/2011	2:30:56 PM	PH3 valve closed
5/10/2011	2:30:56 PM	SiCl4 pre valve closed
5/10/2011	2:30:56 PM	SiCl4 post valve closed
5/10/2011	2:30:56 PM	Bubbler valve closed
5/10/2011	2:30:56 PM	Helium valve opened
5/10/2011	2:30:56 PM	Main Vac valve opened
5/10/2011	2:30:56 PM	Bypass valve opened
5/10/2011	2:30:56 PM	Helium MFC set to  100.000000
5/10/2011	2:30:56 PM	H2 MFC set to  0.000000
5/10/2011	2:30:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:30:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:30:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:30:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:30:56 PM	Tube furnace set to 0
5/10/2011	2:31:56 PM	Helium valve closed
5/10/2011	2:31:56 PM	H2 valve closed
5/10/2011	2:31:56 PM	BCl3 valve closed
5/10/2011	2:31:56 PM	PH3 valve closed
5/10/2011	2:31:56 PM	SiCl4 pre valve closed
5/10/2011	2:31:56 PM	SiCl4 post valve closed
5/10/2011	2:31:56 PM	Bubbler valve closed
5/10/2011	2:31:56 PM	Main Vac valve opened
5/10/2011	2:31:56 PM	Bypass valve opened
5/10/2011	2:31:56 PM	Helium MFC set to  0.000000
5/10/2011	2:31:56 PM	H2 MFC set to  0.000000
5/10/2011	2:31:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:31:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:31:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:31:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:31:56 PM	Tube furnace set to 0
5/10/2011	2:32:56 PM	H2 valve closed
5/10/2011	2:32:56 PM	BCl3 valve closed
5/10/2011	2:32:56 PM	PH3 valve closed
5/10/2011	2:32:56 PM	SiCl4 pre valve closed
5/10/2011	2:32:56 PM	SiCl4 post valve closed
5/10/2011	2:32:56 PM	Bubbler valve closed
5/10/2011	2:32:56 PM	Helium valve opened
5/10/2011	2:32:56 PM	Main Vac valve opened
5/10/2011	2:32:56 PM	Bypass valve opened
5/10/2011	2:32:56 PM	Helium MFC set to  100.000000
5/10/2011	2:32:56 PM	H2 MFC set to  0.000000
5/10/2011	2:32:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:32:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:32:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:32:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:32:56 PM	Tube furnace set to 0
5/10/2011	2:33:56 PM	Helium valve closed
5/10/2011	2:33:56 PM	H2 valve closed
5/10/2011	2:33:56 PM	BCl3 valve closed
5/10/2011	2:33:56 PM	PH3 valve closed
5/10/2011	2:33:56 PM	SiCl4 pre valve closed
5/10/2011	2:33:56 PM	SiCl4 post valve closed
5/10/2011	2:33:56 PM	Bubbler valve closed
5/10/2011	2:33:56 PM	Main Vac valve opened
5/10/2011	2:33:56 PM	Bypass valve opened
5/10/2011	2:33:56 PM	Helium MFC set to  0.000000
5/10/2011	2:33:56 PM	H2 MFC set to  0.000000
5/10/2011	2:33:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:33:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:33:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:33:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:33:56 PM	Tube furnace set to 0
5/10/2011	2:34:56 PM	H2 valve closed
5/10/2011	2:34:56 PM	BCl3 valve closed
5/10/2011	2:34:56 PM	PH3 valve closed
5/10/2011	2:34:56 PM	SiCl4 pre valve closed
5/10/2011	2:34:56 PM	SiCl4 post valve closed
5/10/2011	2:34:56 PM	Bubbler valve closed
5/10/2011	2:34:56 PM	Helium valve opened
5/10/2011	2:34:56 PM	Main Vac valve opened
5/10/2011	2:34:56 PM	Bypass valve opened
5/10/2011	2:34:56 PM	Helium MFC set to  100.000000
5/10/2011	2:34:56 PM	H2 MFC set to  0.000000
5/10/2011	2:34:56 PM	BCl3 MFC set to  0.000000
5/10/2011	2:34:56 PM	PHl3 MFC set to  0.000000
5/10/2011	2:34:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:34:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:34:57 PM	Tube furnace set to 0
5/10/2011	2:35:57 PM	Helium valve closed
5/10/2011	2:35:57 PM	H2 valve closed
5/10/2011	2:35:57 PM	BCl3 valve closed
5/10/2011	2:35:57 PM	PH3 valve closed
5/10/2011	2:35:57 PM	SiCl4 pre valve closed
5/10/2011	2:35:57 PM	SiCl4 post valve closed
5/10/2011	2:35:57 PM	Bubbler valve closed
5/10/2011	2:35:57 PM	Main Vac valve opened
5/10/2011	2:35:57 PM	Bypass valve opened
5/10/2011	2:35:57 PM	Helium MFC set to  0.000000
5/10/2011	2:35:57 PM	H2 MFC set to  0.000000
5/10/2011	2:35:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:35:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:35:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:35:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:35:57 PM	Tube furnace set to 0
5/10/2011	2:36:57 PM	H2 valve closed
5/10/2011	2:36:57 PM	BCl3 valve closed
5/10/2011	2:36:57 PM	PH3 valve closed
5/10/2011	2:36:57 PM	SiCl4 pre valve closed
5/10/2011	2:36:57 PM	SiCl4 post valve closed
5/10/2011	2:36:57 PM	Bubbler valve closed
5/10/2011	2:36:57 PM	Helium valve opened
5/10/2011	2:36:57 PM	Main Vac valve opened
5/10/2011	2:36:57 PM	Bypass valve opened
5/10/2011	2:36:57 PM	Helium MFC set to  100.000000
5/10/2011	2:36:57 PM	H2 MFC set to  0.000000
5/10/2011	2:36:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:36:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:36:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:36:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:36:57 PM	Tube furnace set to 0
5/10/2011	2:37:57 PM	Helium valve closed
5/10/2011	2:37:57 PM	H2 valve closed
5/10/2011	2:37:57 PM	BCl3 valve closed
5/10/2011	2:37:57 PM	PH3 valve closed
5/10/2011	2:37:57 PM	SiCl4 pre valve closed
5/10/2011	2:37:57 PM	SiCl4 post valve closed
5/10/2011	2:37:57 PM	Bubbler valve closed
5/10/2011	2:37:57 PM	Main Vac valve opened
5/10/2011	2:37:57 PM	Bypass valve opened
5/10/2011	2:37:57 PM	Helium MFC set to  0.000000
5/10/2011	2:37:57 PM	H2 MFC set to  0.000000
5/10/2011	2:37:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:37:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:37:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:37:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:37:57 PM	Tube furnace set to 0
5/10/2011	2:38:57 PM	H2 valve closed
5/10/2011	2:38:57 PM	BCl3 valve closed
5/10/2011	2:38:57 PM	PH3 valve closed
5/10/2011	2:38:57 PM	SiCl4 pre valve closed
5/10/2011	2:38:57 PM	SiCl4 post valve closed
5/10/2011	2:38:57 PM	Bubbler valve closed
5/10/2011	2:38:57 PM	Helium valve opened
5/10/2011	2:38:57 PM	Main Vac valve opened
5/10/2011	2:38:57 PM	Bypass valve opened
5/10/2011	2:38:57 PM	Helium MFC set to  100.000000
5/10/2011	2:38:57 PM	H2 MFC set to  0.000000
5/10/2011	2:38:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:38:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:38:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:38:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:38:57 PM	Tube furnace set to 0
5/10/2011	2:39:57 PM	Helium valve closed
5/10/2011	2:39:57 PM	H2 valve closed
5/10/2011	2:39:57 PM	BCl3 valve closed
5/10/2011	2:39:57 PM	PH3 valve closed
5/10/2011	2:39:57 PM	SiCl4 pre valve closed
5/10/2011	2:39:57 PM	SiCl4 post valve closed
5/10/2011	2:39:57 PM	Bubbler valve closed
5/10/2011	2:39:57 PM	Main Vac valve opened
5/10/2011	2:39:57 PM	Bypass valve opened
5/10/2011	2:39:57 PM	Helium MFC set to  0.000000
5/10/2011	2:39:57 PM	H2 MFC set to  0.000000
5/10/2011	2:39:57 PM	BCl3 MFC set to  0.000000
5/10/2011	2:39:57 PM	PHl3 MFC set to  0.000000
5/10/2011	2:39:57 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:39:57 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:39:58 PM	Tube furnace set to 0
5/10/2011	2:40:58 PM	H2 valve closed
5/10/2011	2:40:58 PM	BCl3 valve closed
5/10/2011	2:40:58 PM	PH3 valve closed
5/10/2011	2:40:58 PM	SiCl4 pre valve closed
5/10/2011	2:40:58 PM	SiCl4 post valve closed
5/10/2011	2:40:58 PM	Bubbler valve closed
5/10/2011	2:40:58 PM	Helium valve opened
5/10/2011	2:40:58 PM	Main Vac valve opened
5/10/2011	2:40:58 PM	Bypass valve opened
5/10/2011	2:40:58 PM	Helium MFC set to  100.000000
5/10/2011	2:40:58 PM	H2 MFC set to  0.000000
5/10/2011	2:40:58 PM	BCl3 MFC set to  0.000000
5/10/2011	2:40:58 PM	PHl3 MFC set to  0.000000
5/10/2011	2:40:58 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:40:58 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:40:58 PM	Tube furnace set to 0
5/10/2011	2:41:58 PM	Helium valve closed
5/10/2011	2:41:58 PM	H2 valve closed
5/10/2011	2:41:58 PM	BCl3 valve closed
5/10/2011	2:41:58 PM	PH3 valve closed
5/10/2011	2:41:58 PM	SiCl4 pre valve closed
5/10/2011	2:41:58 PM	SiCl4 post valve closed
5/10/2011	2:41:58 PM	Bubbler valve closed
5/10/2011	2:41:58 PM	Main Vac valve opened
5/10/2011	2:41:58 PM	Bypass valve opened
5/10/2011	2:41:58 PM	Helium MFC set to  0.000000
5/10/2011	2:41:58 PM	H2 MFC set to  0.000000
5/10/2011	2:41:58 PM	BCl3 MFC set to  0.000000
5/10/2011	2:41:58 PM	PHl3 MFC set to  0.000000
5/10/2011	2:41:58 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:41:58 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:41:58 PM	Tube furnace set to 0
5/10/2011	2:42:58 PM	H2 valve closed
5/10/2011	2:42:58 PM	BCl3 valve closed
5/10/2011	2:42:58 PM	PH3 valve closed
5/10/2011	2:42:58 PM	SiCl4 pre valve closed
5/10/2011	2:42:58 PM	SiCl4 post valve closed
5/10/2011	2:42:58 PM	Bubbler valve closed
5/10/2011	2:42:58 PM	Helium valve opened
5/10/2011	2:42:58 PM	Main Vac valve opened
5/10/2011	2:42:58 PM	Bypass valve opened
5/10/2011	2:42:58 PM	Helium MFC set to  100.000000
5/10/2011	2:42:58 PM	H2 MFC set to  0.000000
5/10/2011	2:42:58 PM	BCl3 MFC set to  0.000000
5/10/2011	2:42:58 PM	PHl3 MFC set to  0.000000
5/10/2011	2:42:58 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:42:58 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:42:58 PM	Tube furnace set to 0
5/10/2011	2:43:58 PM	Helium valve closed
5/10/2011	2:43:58 PM	H2 valve closed
5/10/2011	2:43:58 PM	BCl3 valve closed
5/10/2011	2:43:58 PM	PH3 valve closed
5/10/2011	2:43:58 PM	SiCl4 pre valve closed
5/10/2011	2:43:58 PM	SiCl4 post valve closed
5/10/2011	2:43:58 PM	Bubbler valve closed
5/10/2011	2:43:58 PM	Main Vac valve opened
5/10/2011	2:43:58 PM	Bypass valve opened
5/10/2011	2:43:58 PM	Helium MFC set to  0.000000
5/10/2011	2:43:58 PM	H2 MFC set to  0.000000
5/10/2011	2:43:58 PM	BCl3 MFC set to  0.000000
5/10/2011	2:43:58 PM	PHl3 MFC set to  0.000000
5/10/2011	2:43:58 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:43:58 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:43:58 PM	Tube furnace set to 0
5/10/2011	2:44:58 PM	H2 valve closed
5/10/2011	2:44:58 PM	BCl3 valve closed
5/10/2011	2:44:58 PM	PH3 valve closed
5/10/2011	2:44:58 PM	SiCl4 pre valve closed
5/10/2011	2:44:58 PM	SiCl4 post valve closed
5/10/2011	2:44:59 PM	Bubbler valve closed
5/10/2011	2:44:59 PM	Helium valve opened
5/10/2011	2:44:59 PM	Main Vac valve opened
5/10/2011	2:44:59 PM	Bypass valve opened
5/10/2011	2:44:59 PM	Helium MFC set to  100.000000
5/10/2011	2:44:59 PM	H2 MFC set to  0.000000
5/10/2011	2:44:59 PM	BCl3 MFC set to  0.000000
5/10/2011	2:44:59 PM	PHl3 MFC set to  0.000000
5/10/2011	2:44:59 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:44:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:44:59 PM	Tube furnace set to 0
5/10/2011	2:45:59 PM	Helium valve closed
5/10/2011	2:45:59 PM	H2 valve closed
5/10/2011	2:45:59 PM	BCl3 valve closed
5/10/2011	2:45:59 PM	PH3 valve closed
5/10/2011	2:45:59 PM	SiCl4 pre valve closed
5/10/2011	2:45:59 PM	SiCl4 post valve closed
5/10/2011	2:45:59 PM	Bubbler valve closed
5/10/2011	2:45:59 PM	Main Vac valve opened
5/10/2011	2:45:59 PM	Bypass valve opened
5/10/2011	2:45:59 PM	Helium MFC set to  0.000000
5/10/2011	2:45:59 PM	H2 MFC set to  0.000000
5/10/2011	2:45:59 PM	BCl3 MFC set to  0.000000
5/10/2011	2:45:59 PM	PHl3 MFC set to  0.000000
5/10/2011	2:45:59 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:45:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:45:59 PM	Tube furnace set to 0
5/10/2011	2:46:59 PM	H2 valve closed
5/10/2011	2:46:59 PM	BCl3 valve closed
5/10/2011	2:46:59 PM	PH3 valve closed
5/10/2011	2:46:59 PM	SiCl4 pre valve closed
5/10/2011	2:46:59 PM	SiCl4 post valve closed
5/10/2011	2:46:59 PM	Bubbler valve closed
5/10/2011	2:46:59 PM	Helium valve opened
5/10/2011	2:46:59 PM	Main Vac valve opened
5/10/2011	2:46:59 PM	Bypass valve opened
5/10/2011	2:46:59 PM	Helium MFC set to  100.000000
5/10/2011	2:46:59 PM	H2 MFC set to  0.000000
5/10/2011	2:46:59 PM	BCl3 MFC set to  0.000000
5/10/2011	2:46:59 PM	PHl3 MFC set to  0.000000
5/10/2011	2:46:59 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:46:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:46:59 PM	Tube furnace set to 0
5/10/2011	2:47:59 PM	Helium valve closed
5/10/2011	2:47:59 PM	H2 valve closed
5/10/2011	2:47:59 PM	BCl3 valve closed
5/10/2011	2:47:59 PM	PH3 valve closed
5/10/2011	2:47:59 PM	SiCl4 pre valve closed
5/10/2011	2:47:59 PM	SiCl4 post valve closed
5/10/2011	2:47:59 PM	Bubbler valve closed
5/10/2011	2:47:59 PM	Main Vac valve opened
5/10/2011	2:47:59 PM	Bypass valve opened
5/10/2011	2:47:59 PM	Helium MFC set to  0.000000
5/10/2011	2:47:59 PM	H2 MFC set to  0.000000
5/10/2011	2:47:59 PM	BCl3 MFC set to  0.000000
5/10/2011	2:47:59 PM	PHl3 MFC set to  0.000000
5/10/2011	2:47:59 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:47:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:47:59 PM	Tube furnace set to 0
5/10/2011	2:48:59 PM	H2 valve closed
5/10/2011	2:48:59 PM	BCl3 valve closed
5/10/2011	2:48:59 PM	PH3 valve closed
5/10/2011	2:48:59 PM	SiCl4 pre valve closed
5/10/2011	2:48:59 PM	SiCl4 post valve closed
5/10/2011	2:48:59 PM	Bubbler valve closed
5/10/2011	2:48:59 PM	Helium valve opened
5/10/2011	2:48:59 PM	Main Vac valve opened
5/10/2011	2:48:59 PM	Bypass valve opened
5/10/2011	2:48:59 PM	Helium MFC set to  100.000000
5/10/2011	2:48:59 PM	H2 MFC set to  0.000000
5/10/2011	2:48:59 PM	BCl3 MFC set to  0.000000
5/10/2011	2:48:59 PM	PHl3 MFC set to  0.000000
5/10/2011	2:48:59 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:48:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:48:59 PM	Tube furnace set to 0
5/10/2011	2:50:00 PM	Helium valve closed
5/10/2011	2:50:00 PM	H2 valve closed
5/10/2011	2:50:00 PM	BCl3 valve closed
5/10/2011	2:50:00 PM	PH3 valve closed
5/10/2011	2:50:00 PM	SiCl4 pre valve closed
5/10/2011	2:50:00 PM	SiCl4 post valve closed
5/10/2011	2:50:00 PM	Bubbler valve closed
5/10/2011	2:50:00 PM	Main Vac valve opened
5/10/2011	2:50:00 PM	Bypass valve opened
5/10/2011	2:50:00 PM	Helium MFC set to  0.000000
5/10/2011	2:50:00 PM	H2 MFC set to  0.000000
5/10/2011	2:50:00 PM	BCl3 MFC set to  0.000000
5/10/2011	2:50:00 PM	PHl3 MFC set to  0.000000
5/10/2011	2:50:00 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:50:00 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:50:00 PM	Tube furnace set to 0
5/10/2011	2:50:01 PM	Run finished at 2:50 PM
5/10/2011	2:50:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	2:57:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	2:57:47 PM	Recipe started at 2:57 PM
5/10/2011	2:57:47 PM	H2 valve closed
5/10/2011	2:57:47 PM	BCl3 valve closed
5/10/2011	2:57:47 PM	PH3 valve closed
5/10/2011	2:57:47 PM	SiCl4 pre valve closed
5/10/2011	2:57:47 PM	SiCl4 post valve closed
5/10/2011	2:57:47 PM	Main Vac valve closed
5/10/2011	2:57:47 PM	Bypass valve closed
5/10/2011	2:57:47 PM	Bubbler valve closed
5/10/2011	2:57:47 PM	Helium valve opened
5/10/2011	2:57:47 PM	Helium MFC set to  500.000000
5/10/2011	2:57:47 PM	H2 MFC set to  0.000000
5/10/2011	2:57:47 PM	BCl3 MFC set to  0.000000
5/10/2011	2:57:47 PM	PHl3 MFC set to  0.000000
5/10/2011	2:57:47 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:57:47 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:57:47 PM	Tube furnace set to 0
5/10/2011	2:58:02 PM	Helium valve closed
5/10/2011	2:58:02 PM	H2 valve closed
5/10/2011	2:58:02 PM	BCl3 valve closed
5/10/2011	2:58:02 PM	PH3 valve closed
5/10/2011	2:58:02 PM	SiCl4 pre valve closed
5/10/2011	2:58:02 PM	SiCl4 post valve closed
5/10/2011	2:58:02 PM	Main Vac valve closed
5/10/2011	2:58:02 PM	Bypass valve closed
5/10/2011	2:58:02 PM	Bubbler valve closed
5/10/2011	2:58:02 PM	Helium MFC set to  0.000000
5/10/2011	2:58:02 PM	H2 MFC set to  0.000000
5/10/2011	2:58:02 PM	BCl3 MFC set to  0.000000
5/10/2011	2:58:02 PM	PHl3 MFC set to  0.000000
5/10/2011	2:58:02 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:58:02 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:58:03 PM	Tube furnace set to 0
5/10/2011	2:58:03 PM	Run finished at 2:58 PM
5/10/2011	2:58:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	2:58:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	2:58:06 PM	Recipe started at 2:58 PM
5/10/2011	2:58:06 PM	Helium valve closed
5/10/2011	2:58:06 PM	H2 valve closed
5/10/2011	2:58:06 PM	BCl3 valve closed
5/10/2011	2:58:06 PM	PH3 valve closed
5/10/2011	2:58:06 PM	SiCl4 pre valve closed
5/10/2011	2:58:06 PM	SiCl4 post valve closed
5/10/2011	2:58:06 PM	Main Vac valve closed
5/10/2011	2:58:06 PM	Bubbler valve closed
5/10/2011	2:58:06 PM	Bypass valve opened
5/10/2011	2:58:06 PM	Helium MFC set to  0.000000
5/10/2011	2:58:06 PM	H2 MFC set to  0.000000
5/10/2011	2:58:06 PM	BCl3 MFC set to  0.000000
5/10/2011	2:58:06 PM	PHl3 MFC set to  0.000000
5/10/2011	2:58:06 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:58:06 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:58:06 PM	Tube furnace set to 0
5/10/2011	2:58:18 PM	Helium valve closed
5/10/2011	2:58:18 PM	H2 valve closed
5/10/2011	2:58:18 PM	BCl3 valve closed
5/10/2011	2:58:18 PM	PH3 valve closed
5/10/2011	2:58:18 PM	SiCl4 pre valve closed
5/10/2011	2:58:18 PM	SiCl4 post valve closed
5/10/2011	2:58:18 PM	Bubbler valve closed
5/10/2011	2:58:18 PM	Main Vac valve opened
5/10/2011	2:58:18 PM	Bypass valve opened
5/10/2011	2:58:18 PM	Helium MFC set to  0.000000
5/10/2011	2:58:18 PM	H2 MFC set to  0.000000
5/10/2011	2:58:18 PM	BCl3 MFC set to  0.000000
5/10/2011	2:58:18 PM	PHl3 MFC set to  0.000000
5/10/2011	2:58:18 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:58:18 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:58:18 PM	Tube furnace set to 0
5/10/2011	2:58:18 PM	Run finished at 2:58 PM
5/10/2011	2:58:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	2:59:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	2:59:22 PM	Recipe started at 2:59 PM
5/10/2011	2:59:22 PM	H2 valve closed
5/10/2011	2:59:22 PM	BCl3 valve closed
5/10/2011	2:59:22 PM	PH3 valve closed
5/10/2011	2:59:22 PM	SiCl4 pre valve closed
5/10/2011	2:59:22 PM	SiCl4 post valve closed
5/10/2011	2:59:22 PM	Main Vac valve closed
5/10/2011	2:59:22 PM	Bypass valve closed
5/10/2011	2:59:22 PM	Bubbler valve closed
5/10/2011	2:59:22 PM	Helium valve opened
5/10/2011	2:59:22 PM	Helium MFC set to  500.000000
5/10/2011	2:59:22 PM	H2 MFC set to  0.000000
5/10/2011	2:59:22 PM	BCl3 MFC set to  0.000000
5/10/2011	2:59:22 PM	PHl3 MFC set to  0.000000
5/10/2011	2:59:22 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:59:22 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:59:22 PM	Tube furnace set to 0
5/10/2011	2:59:46 PM	Helium valve closed
5/10/2011	2:59:46 PM	H2 valve closed
5/10/2011	2:59:46 PM	BCl3 valve closed
5/10/2011	2:59:46 PM	PH3 valve closed
5/10/2011	2:59:46 PM	SiCl4 pre valve closed
5/10/2011	2:59:46 PM	SiCl4 post valve closed
5/10/2011	2:59:46 PM	Main Vac valve closed
5/10/2011	2:59:46 PM	Bypass valve closed
5/10/2011	2:59:46 PM	Bubbler valve closed
5/10/2011	2:59:46 PM	Helium MFC set to  0.000000
5/10/2011	2:59:46 PM	H2 MFC set to  0.000000
5/10/2011	2:59:46 PM	BCl3 MFC set to  0.000000
5/10/2011	2:59:46 PM	PHl3 MFC set to  0.000000
5/10/2011	2:59:46 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:59:46 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:59:46 PM	Tube furnace set to 0
5/10/2011	2:59:47 PM	Run finished at 2:59 PM
5/10/2011	2:59:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	2:59:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	2:59:49 PM	Recipe started at 2:59 PM
5/10/2011	2:59:49 PM	Helium valve closed
5/10/2011	2:59:49 PM	H2 valve closed
5/10/2011	2:59:49 PM	BCl3 valve closed
5/10/2011	2:59:49 PM	PH3 valve closed
5/10/2011	2:59:49 PM	SiCl4 pre valve closed
5/10/2011	2:59:49 PM	SiCl4 post valve closed
5/10/2011	2:59:49 PM	Main Vac valve closed
5/10/2011	2:59:49 PM	Bubbler valve closed
5/10/2011	2:59:49 PM	Bypass valve opened
5/10/2011	2:59:49 PM	Helium MFC set to  0.000000
5/10/2011	2:59:49 PM	H2 MFC set to  0.000000
5/10/2011	2:59:49 PM	BCl3 MFC set to  0.000000
5/10/2011	2:59:49 PM	PHl3 MFC set to  0.000000
5/10/2011	2:59:49 PM	SiCl4 MFC set to  0.000000
5/10/2011	2:59:49 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	2:59:49 PM	Tube furnace set to 0
5/10/2011	3:00:05 PM	Helium valve closed
5/10/2011	3:00:05 PM	H2 valve closed
5/10/2011	3:00:05 PM	BCl3 valve closed
5/10/2011	3:00:05 PM	PH3 valve closed
5/10/2011	3:00:05 PM	SiCl4 pre valve closed
5/10/2011	3:00:05 PM	SiCl4 post valve closed
5/10/2011	3:00:05 PM	Bubbler valve closed
5/10/2011	3:00:05 PM	Main Vac valve opened
5/10/2011	3:00:05 PM	Bypass valve opened
5/10/2011	3:00:05 PM	Helium MFC set to  0.000000
5/10/2011	3:00:05 PM	H2 MFC set to  0.000000
5/10/2011	3:00:05 PM	BCl3 MFC set to  0.000000
5/10/2011	3:00:05 PM	PHl3 MFC set to  0.000000
5/10/2011	3:00:05 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:00:05 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:00:05 PM	Tube furnace set to 0
5/10/2011	3:00:05 PM	Run finished at 3:00 PM
5/10/2011	3:00:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	3:01:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	3:02:09 PM	Recipe started at 3:02 PM
5/10/2011	3:02:09 PM	Helium valve closed
5/10/2011	3:02:09 PM	H2 valve closed
5/10/2011	3:02:10 PM	BCl3 valve closed
5/10/2011	3:02:10 PM	PH3 valve closed
5/10/2011	3:02:10 PM	SiCl4 pre valve closed
5/10/2011	3:02:10 PM	SiCl4 post valve closed
5/10/2011	3:02:10 PM	Main Vac valve closed
5/10/2011	3:02:10 PM	Bubbler valve closed
5/10/2011	3:02:10 PM	Bypass valve opened
5/10/2011	3:02:10 PM	Helium MFC set to  0.000000
5/10/2011	3:02:10 PM	H2 MFC set to  0.000000
5/10/2011	3:02:10 PM	BCl3 MFC set to  0.000000
5/10/2011	3:02:10 PM	PHl3 MFC set to  0.000000
5/10/2011	3:02:10 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:02:10 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:02:10 PM	Tube furnace set to 0
5/10/2011	3:02:10 PM	Helium valve closed
5/10/2011	3:02:10 PM	H2 valve closed
5/10/2011	3:02:10 PM	BCl3 valve closed
5/10/2011	3:02:10 PM	PH3 valve closed
5/10/2011	3:02:10 PM	SiCl4 pre valve closed
5/10/2011	3:02:10 PM	SiCl4 post valve closed
5/10/2011	3:02:10 PM	Bubbler valve closed
5/10/2011	3:02:10 PM	Main Vac valve opened
5/10/2011	3:02:10 PM	Bypass valve opened
5/10/2011	3:02:10 PM	Helium MFC set to  0.000000
5/10/2011	3:02:10 PM	H2 MFC set to  0.000000
5/10/2011	3:02:10 PM	BCl3 MFC set to  0.000000
5/10/2011	3:02:10 PM	PHl3 MFC set to  0.000000
5/10/2011	3:02:10 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:02:10 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:02:10 PM	Tube furnace set to 0
5/10/2011	3:03:10 PM	H2 valve closed
5/10/2011	3:03:10 PM	BCl3 valve closed
5/10/2011	3:03:10 PM	PH3 valve closed
5/10/2011	3:03:10 PM	SiCl4 pre valve closed
5/10/2011	3:03:10 PM	SiCl4 post valve closed
5/10/2011	3:03:10 PM	Bubbler valve closed
5/10/2011	3:03:10 PM	Helium valve opened
5/10/2011	3:03:10 PM	Main Vac valve opened
5/10/2011	3:03:10 PM	Bypass valve opened
5/10/2011	3:03:10 PM	Helium MFC set to  100.000000
5/10/2011	3:03:10 PM	H2 MFC set to  0.000000
5/10/2011	3:03:10 PM	BCl3 MFC set to  0.000000
5/10/2011	3:03:10 PM	PHl3 MFC set to  0.000000
5/10/2011	3:03:10 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:03:10 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:03:10 PM	Tube furnace set to 0
5/10/2011	3:04:10 PM	Helium valve closed
5/10/2011	3:04:10 PM	H2 valve closed
5/10/2011	3:04:10 PM	BCl3 valve closed
5/10/2011	3:04:10 PM	PH3 valve closed
5/10/2011	3:04:10 PM	SiCl4 pre valve closed
5/10/2011	3:04:10 PM	SiCl4 post valve closed
5/10/2011	3:04:10 PM	Bubbler valve closed
5/10/2011	3:04:10 PM	Main Vac valve opened
5/10/2011	3:04:10 PM	Bypass valve opened
5/10/2011	3:04:10 PM	Helium MFC set to  0.000000
5/10/2011	3:04:10 PM	H2 MFC set to  0.000000
5/10/2011	3:04:10 PM	BCl3 MFC set to  0.000000
5/10/2011	3:04:10 PM	PHl3 MFC set to  0.000000
5/10/2011	3:04:10 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:04:10 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:04:11 PM	Tube furnace set to 0
5/10/2011	3:05:11 PM	H2 valve closed
5/10/2011	3:05:11 PM	BCl3 valve closed
5/10/2011	3:05:11 PM	PH3 valve closed
5/10/2011	3:05:11 PM	SiCl4 pre valve closed
5/10/2011	3:05:11 PM	SiCl4 post valve closed
5/10/2011	3:05:11 PM	Bubbler valve closed
5/10/2011	3:05:11 PM	Helium valve opened
5/10/2011	3:05:11 PM	Main Vac valve opened
5/10/2011	3:05:11 PM	Bypass valve opened
5/10/2011	3:05:11 PM	Helium MFC set to  100.000000
5/10/2011	3:05:11 PM	H2 MFC set to  0.000000
5/10/2011	3:05:11 PM	BCl3 MFC set to  0.000000
5/10/2011	3:05:11 PM	PHl3 MFC set to  0.000000
5/10/2011	3:05:11 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:05:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:05:11 PM	Tube furnace set to 0
5/10/2011	3:06:11 PM	Helium valve closed
5/10/2011	3:06:11 PM	H2 valve closed
5/10/2011	3:06:11 PM	BCl3 valve closed
5/10/2011	3:06:11 PM	PH3 valve closed
5/10/2011	3:06:11 PM	SiCl4 pre valve closed
5/10/2011	3:06:11 PM	SiCl4 post valve closed
5/10/2011	3:06:11 PM	Bubbler valve closed
5/10/2011	3:06:11 PM	Main Vac valve opened
5/10/2011	3:06:11 PM	Bypass valve opened
5/10/2011	3:06:11 PM	Helium MFC set to  0.000000
5/10/2011	3:06:11 PM	H2 MFC set to  0.000000
5/10/2011	3:06:11 PM	BCl3 MFC set to  0.000000
5/10/2011	3:06:11 PM	PHl3 MFC set to  0.000000
5/10/2011	3:06:11 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:06:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:06:11 PM	Tube furnace set to 0
5/10/2011	3:07:11 PM	H2 valve closed
5/10/2011	3:07:11 PM	BCl3 valve closed
5/10/2011	3:07:11 PM	PH3 valve closed
5/10/2011	3:07:11 PM	SiCl4 pre valve closed
5/10/2011	3:07:11 PM	SiCl4 post valve closed
5/10/2011	3:07:11 PM	Bubbler valve closed
5/10/2011	3:07:11 PM	Helium valve opened
5/10/2011	3:07:11 PM	Main Vac valve opened
5/10/2011	3:07:11 PM	Bypass valve opened
5/10/2011	3:07:11 PM	Helium MFC set to  100.000000
5/10/2011	3:07:11 PM	H2 MFC set to  0.000000
5/10/2011	3:07:11 PM	BCl3 MFC set to  0.000000
5/10/2011	3:07:11 PM	PHl3 MFC set to  0.000000
5/10/2011	3:07:11 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:07:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:07:11 PM	Tube furnace set to 0
5/10/2011	3:08:11 PM	Helium valve closed
5/10/2011	3:08:11 PM	H2 valve closed
5/10/2011	3:08:11 PM	BCl3 valve closed
5/10/2011	3:08:11 PM	PH3 valve closed
5/10/2011	3:08:11 PM	SiCl4 pre valve closed
5/10/2011	3:08:11 PM	SiCl4 post valve closed
5/10/2011	3:08:11 PM	Bubbler valve closed
5/10/2011	3:08:11 PM	Main Vac valve opened
5/10/2011	3:08:11 PM	Bypass valve opened
5/10/2011	3:08:11 PM	Helium MFC set to  0.000000
5/10/2011	3:08:11 PM	H2 MFC set to  0.000000
5/10/2011	3:08:11 PM	BCl3 MFC set to  0.000000
5/10/2011	3:08:11 PM	PHl3 MFC set to  0.000000
5/10/2011	3:08:11 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:08:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:08:11 PM	Tube furnace set to 0
5/10/2011	3:09:11 PM	H2 valve closed
5/10/2011	3:09:11 PM	BCl3 valve closed
5/10/2011	3:09:11 PM	PH3 valve closed
5/10/2011	3:09:11 PM	SiCl4 pre valve closed
5/10/2011	3:09:11 PM	SiCl4 post valve closed
5/10/2011	3:09:11 PM	Bubbler valve closed
5/10/2011	3:09:11 PM	Helium valve opened
5/10/2011	3:09:11 PM	Main Vac valve opened
5/10/2011	3:09:11 PM	Bypass valve opened
5/10/2011	3:09:11 PM	Helium MFC set to  100.000000
5/10/2011	3:09:11 PM	H2 MFC set to  0.000000
5/10/2011	3:09:11 PM	BCl3 MFC set to  0.000000
5/10/2011	3:09:11 PM	PHl3 MFC set to  0.000000
5/10/2011	3:09:11 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:09:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:09:12 PM	Tube furnace set to 0
5/10/2011	3:10:12 PM	Helium valve closed
5/10/2011	3:10:12 PM	H2 valve closed
5/10/2011	3:10:12 PM	BCl3 valve closed
5/10/2011	3:10:12 PM	PH3 valve closed
5/10/2011	3:10:12 PM	SiCl4 pre valve closed
5/10/2011	3:10:12 PM	SiCl4 post valve closed
5/10/2011	3:10:12 PM	Bubbler valve closed
5/10/2011	3:10:12 PM	Main Vac valve opened
5/10/2011	3:10:12 PM	Bypass valve opened
5/10/2011	3:10:12 PM	Helium MFC set to  0.000000
5/10/2011	3:10:12 PM	H2 MFC set to  0.000000
5/10/2011	3:10:12 PM	BCl3 MFC set to  0.000000
5/10/2011	3:10:12 PM	PHl3 MFC set to  0.000000
5/10/2011	3:10:12 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:10:12 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:10:12 PM	Tube furnace set to 0
5/10/2011	3:11:12 PM	H2 valve closed
5/10/2011	3:11:12 PM	BCl3 valve closed
5/10/2011	3:11:12 PM	PH3 valve closed
5/10/2011	3:11:12 PM	SiCl4 pre valve closed
5/10/2011	3:11:12 PM	SiCl4 post valve closed
5/10/2011	3:11:12 PM	Bubbler valve closed
5/10/2011	3:11:12 PM	Helium valve opened
5/10/2011	3:11:12 PM	Main Vac valve opened
5/10/2011	3:11:12 PM	Bypass valve opened
5/10/2011	3:11:12 PM	Helium MFC set to  100.000000
5/10/2011	3:11:12 PM	H2 MFC set to  0.000000
5/10/2011	3:11:12 PM	BCl3 MFC set to  0.000000
5/10/2011	3:11:12 PM	PHl3 MFC set to  0.000000
5/10/2011	3:11:12 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:11:12 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:11:12 PM	Tube furnace set to 0
5/10/2011	3:12:12 PM	Helium valve closed
5/10/2011	3:12:12 PM	H2 valve closed
5/10/2011	3:12:12 PM	BCl3 valve closed
5/10/2011	3:12:12 PM	PH3 valve closed
5/10/2011	3:12:12 PM	SiCl4 pre valve closed
5/10/2011	3:12:12 PM	SiCl4 post valve closed
5/10/2011	3:12:12 PM	Bubbler valve closed
5/10/2011	3:12:12 PM	Main Vac valve opened
5/10/2011	3:12:12 PM	Bypass valve opened
5/10/2011	3:12:12 PM	Helium MFC set to  0.000000
5/10/2011	3:12:12 PM	H2 MFC set to  0.000000
5/10/2011	3:12:12 PM	BCl3 MFC set to  0.000000
5/10/2011	3:12:12 PM	PHl3 MFC set to  0.000000
5/10/2011	3:12:12 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:12:12 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:12:12 PM	Tube furnace set to 0
5/10/2011	3:13:12 PM	H2 valve closed
5/10/2011	3:13:12 PM	BCl3 valve closed
5/10/2011	3:13:12 PM	PH3 valve closed
5/10/2011	3:13:12 PM	SiCl4 pre valve closed
5/10/2011	3:13:12 PM	SiCl4 post valve closed
5/10/2011	3:13:12 PM	Bubbler valve closed
5/10/2011	3:13:12 PM	Helium valve opened
5/10/2011	3:13:12 PM	Main Vac valve opened
5/10/2011	3:13:12 PM	Bypass valve opened
5/10/2011	3:13:12 PM	Helium MFC set to  100.000000
5/10/2011	3:13:12 PM	H2 MFC set to  0.000000
5/10/2011	3:13:12 PM	BCl3 MFC set to  0.000000
5/10/2011	3:13:12 PM	PHl3 MFC set to  0.000000
5/10/2011	3:13:12 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:13:12 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:13:12 PM	Tube furnace set to 0
5/10/2011	3:14:12 PM	Helium valve closed
5/10/2011	3:14:12 PM	H2 valve closed
5/10/2011	3:14:12 PM	BCl3 valve closed
5/10/2011	3:14:12 PM	PH3 valve closed
5/10/2011	3:14:12 PM	SiCl4 pre valve closed
5/10/2011	3:14:12 PM	SiCl4 post valve closed
5/10/2011	3:14:12 PM	Bubbler valve closed
5/10/2011	3:14:12 PM	Main Vac valve opened
5/10/2011	3:14:12 PM	Bypass valve opened
5/10/2011	3:14:12 PM	Helium MFC set to  0.000000
5/10/2011	3:14:12 PM	H2 MFC set to  0.000000
5/10/2011	3:14:12 PM	BCl3 MFC set to  0.000000
5/10/2011	3:14:12 PM	PHl3 MFC set to  0.000000
5/10/2011	3:14:12 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:14:12 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:14:13 PM	Tube furnace set to 0
5/10/2011	3:15:13 PM	H2 valve closed
5/10/2011	3:15:13 PM	BCl3 valve closed
5/10/2011	3:15:13 PM	PH3 valve closed
5/10/2011	3:15:13 PM	SiCl4 pre valve closed
5/10/2011	3:15:13 PM	SiCl4 post valve closed
5/10/2011	3:15:13 PM	Bubbler valve closed
5/10/2011	3:15:13 PM	Helium valve opened
5/10/2011	3:15:13 PM	Main Vac valve opened
5/10/2011	3:15:13 PM	Bypass valve opened
5/10/2011	3:15:13 PM	Helium MFC set to  100.000000
5/10/2011	3:15:13 PM	H2 MFC set to  0.000000
5/10/2011	3:15:13 PM	BCl3 MFC set to  0.000000
5/10/2011	3:15:13 PM	PHl3 MFC set to  0.000000
5/10/2011	3:15:13 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:15:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:15:13 PM	Tube furnace set to 0
5/10/2011	3:16:13 PM	Helium valve closed
5/10/2011	3:16:13 PM	H2 valve closed
5/10/2011	3:16:13 PM	BCl3 valve closed
5/10/2011	3:16:13 PM	PH3 valve closed
5/10/2011	3:16:13 PM	SiCl4 pre valve closed
5/10/2011	3:16:13 PM	SiCl4 post valve closed
5/10/2011	3:16:13 PM	Bubbler valve closed
5/10/2011	3:16:13 PM	Main Vac valve opened
5/10/2011	3:16:13 PM	Bypass valve opened
5/10/2011	3:16:13 PM	Helium MFC set to  0.000000
5/10/2011	3:16:13 PM	H2 MFC set to  0.000000
5/10/2011	3:16:13 PM	BCl3 MFC set to  0.000000
5/10/2011	3:16:13 PM	PHl3 MFC set to  0.000000
5/10/2011	3:16:13 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:16:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:16:13 PM	Tube furnace set to 0
5/10/2011	3:17:13 PM	H2 valve closed
5/10/2011	3:17:13 PM	BCl3 valve closed
5/10/2011	3:17:13 PM	PH3 valve closed
5/10/2011	3:17:13 PM	SiCl4 pre valve closed
5/10/2011	3:17:13 PM	SiCl4 post valve closed
5/10/2011	3:17:13 PM	Bubbler valve closed
5/10/2011	3:17:13 PM	Helium valve opened
5/10/2011	3:17:13 PM	Main Vac valve opened
5/10/2011	3:17:13 PM	Bypass valve opened
5/10/2011	3:17:13 PM	Helium MFC set to  100.000000
5/10/2011	3:17:13 PM	H2 MFC set to  0.000000
5/10/2011	3:17:13 PM	BCl3 MFC set to  0.000000
5/10/2011	3:17:13 PM	PHl3 MFC set to  0.000000
5/10/2011	3:17:13 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:17:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:17:13 PM	Tube furnace set to 0
5/10/2011	3:18:13 PM	Helium valve closed
5/10/2011	3:18:13 PM	H2 valve closed
5/10/2011	3:18:13 PM	BCl3 valve closed
5/10/2011	3:18:13 PM	PH3 valve closed
5/10/2011	3:18:13 PM	SiCl4 pre valve closed
5/10/2011	3:18:13 PM	SiCl4 post valve closed
5/10/2011	3:18:13 PM	Bubbler valve closed
5/10/2011	3:18:13 PM	Main Vac valve opened
5/10/2011	3:18:13 PM	Bypass valve opened
5/10/2011	3:18:13 PM	Helium MFC set to  0.000000
5/10/2011	3:18:13 PM	H2 MFC set to  0.000000
5/10/2011	3:18:13 PM	BCl3 MFC set to  0.000000
5/10/2011	3:18:13 PM	PHl3 MFC set to  0.000000
5/10/2011	3:18:13 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:18:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:18:13 PM	Tube furnace set to 0
5/10/2011	3:19:13 PM	H2 valve closed
5/10/2011	3:19:13 PM	BCl3 valve closed
5/10/2011	3:19:13 PM	PH3 valve closed
5/10/2011	3:19:13 PM	SiCl4 pre valve closed
5/10/2011	3:19:13 PM	SiCl4 post valve closed
5/10/2011	3:19:13 PM	Bubbler valve closed
5/10/2011	3:19:13 PM	Helium valve opened
5/10/2011	3:19:13 PM	Main Vac valve opened
5/10/2011	3:19:13 PM	Bypass valve opened
5/10/2011	3:19:13 PM	Helium MFC set to  100.000000
5/10/2011	3:19:13 PM	H2 MFC set to  0.000000
5/10/2011	3:19:13 PM	BCl3 MFC set to  0.000000
5/10/2011	3:19:13 PM	PHl3 MFC set to  0.000000
5/10/2011	3:19:13 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:19:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:19:14 PM	Tube furnace set to 0
5/10/2011	3:20:14 PM	Helium valve closed
5/10/2011	3:20:14 PM	H2 valve closed
5/10/2011	3:20:14 PM	BCl3 valve closed
5/10/2011	3:20:14 PM	PH3 valve closed
5/10/2011	3:20:14 PM	SiCl4 pre valve closed
5/10/2011	3:20:14 PM	SiCl4 post valve closed
5/10/2011	3:20:14 PM	Bubbler valve closed
5/10/2011	3:20:14 PM	Main Vac valve opened
5/10/2011	3:20:14 PM	Bypass valve opened
5/10/2011	3:20:14 PM	Helium MFC set to  0.000000
5/10/2011	3:20:14 PM	H2 MFC set to  0.000000
5/10/2011	3:20:14 PM	BCl3 MFC set to  0.000000
5/10/2011	3:20:14 PM	PHl3 MFC set to  0.000000
5/10/2011	3:20:14 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:20:14 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:20:14 PM	Tube furnace set to 0
5/10/2011	3:21:14 PM	H2 valve closed
5/10/2011	3:21:14 PM	BCl3 valve closed
5/10/2011	3:21:14 PM	PH3 valve closed
5/10/2011	3:21:14 PM	SiCl4 pre valve closed
5/10/2011	3:21:14 PM	SiCl4 post valve closed
5/10/2011	3:21:14 PM	Bubbler valve closed
5/10/2011	3:21:14 PM	Helium valve opened
5/10/2011	3:21:14 PM	Main Vac valve opened
5/10/2011	3:21:14 PM	Bypass valve opened
5/10/2011	3:21:14 PM	Helium MFC set to  100.000000
5/10/2011	3:21:14 PM	H2 MFC set to  0.000000
5/10/2011	3:21:14 PM	BCl3 MFC set to  0.000000
5/10/2011	3:21:14 PM	PHl3 MFC set to  0.000000
5/10/2011	3:21:14 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:21:14 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:21:14 PM	Tube furnace set to 0
5/10/2011	3:22:14 PM	Helium valve closed
5/10/2011	3:22:14 PM	H2 valve closed
5/10/2011	3:22:14 PM	BCl3 valve closed
5/10/2011	3:22:14 PM	PH3 valve closed
5/10/2011	3:22:14 PM	SiCl4 pre valve closed
5/10/2011	3:22:14 PM	SiCl4 post valve closed
5/10/2011	3:22:14 PM	Bubbler valve closed
5/10/2011	3:22:14 PM	Main Vac valve opened
5/10/2011	3:22:14 PM	Bypass valve opened
5/10/2011	3:22:14 PM	Helium MFC set to  0.000000
5/10/2011	3:22:14 PM	H2 MFC set to  0.000000
5/10/2011	3:22:14 PM	BCl3 MFC set to  0.000000
5/10/2011	3:22:14 PM	PHl3 MFC set to  0.000000
5/10/2011	3:22:14 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:22:14 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:22:14 PM	Tube furnace set to 0
5/10/2011	3:22:15 PM	Run finished at 3:22 PM
5/10/2011	3:22:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	3:54:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	3:54:18 PM	Recipe started at 3:54 PM
5/10/2011	3:54:18 PM	Helium valve closed
5/10/2011	3:54:18 PM	H2 valve closed
5/10/2011	3:54:18 PM	BCl3 valve closed
5/10/2011	3:54:18 PM	PH3 valve closed
5/10/2011	3:54:18 PM	SiCl4 pre valve closed
5/10/2011	3:54:18 PM	SiCl4 post valve closed
5/10/2011	3:54:18 PM	Main Vac valve closed
5/10/2011	3:54:18 PM	Bubbler valve closed
5/10/2011	3:54:18 PM	Bypass valve opened
5/10/2011	3:54:18 PM	Helium MFC set to  0.000000
5/10/2011	3:54:18 PM	H2 MFC set to  0.000000
5/10/2011	3:54:18 PM	BCl3 MFC set to  0.000000
5/10/2011	3:54:18 PM	PHl3 MFC set to  0.000000
5/10/2011	3:54:18 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:54:18 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:54:19 PM	Tube furnace set to 0
5/10/2011	3:54:19 PM	Helium valve closed
5/10/2011	3:54:19 PM	H2 valve closed
5/10/2011	3:54:19 PM	BCl3 valve closed
5/10/2011	3:54:19 PM	PH3 valve closed
5/10/2011	3:54:19 PM	SiCl4 pre valve closed
5/10/2011	3:54:19 PM	SiCl4 post valve closed
5/10/2011	3:54:19 PM	Bubbler valve closed
5/10/2011	3:54:19 PM	Main Vac valve opened
5/10/2011	3:54:19 PM	Bypass valve opened
5/10/2011	3:54:19 PM	Helium MFC set to  0.000000
5/10/2011	3:54:19 PM	H2 MFC set to  0.000000
5/10/2011	3:54:19 PM	BCl3 MFC set to  0.000000
5/10/2011	3:54:19 PM	PHl3 MFC set to  0.000000
5/10/2011	3:54:19 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:54:19 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:54:19 PM	Tube furnace set to 0
5/10/2011	3:54:36 PM	Run aborted at 3:54 PM
5/10/2011	3:54:36 PM	Helium valve closed
5/10/2011	3:54:36 PM	H2 valve closed
5/10/2011	3:54:36 PM	BCl3 valve closed
5/10/2011	3:54:36 PM	PH3 valve closed
5/10/2011	3:54:36 PM	SiCl4 pre valve closed
5/10/2011	3:54:36 PM	SiCl4 post valve closed
5/10/2011	3:54:36 PM	Bypass valve closed
5/10/2011	3:54:36 PM	Main Vac valve closed
5/10/2011	3:54:36 PM	Bubbler valve closed
5/10/2011	3:54:36 PM	Helium MFC set to  0.000000
5/10/2011	3:54:36 PM	H2 MFC set to  0.000000
5/10/2011	3:54:37 PM	BCl3 MFC set to  0.000000
5/10/2011	3:54:37 PM	PHl3 MFC set to  0.000000
5/10/2011	3:54:37 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:54:37 PM	Tube furnace set to 0
5/10/2011	3:54:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	3:54:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	3:54:39 PM	Recipe started at 3:54 PM
5/10/2011	3:54:39 PM	Helium valve closed
5/10/2011	3:54:39 PM	H2 valve closed
5/10/2011	3:54:39 PM	BCl3 valve closed
5/10/2011	3:54:39 PM	PH3 valve closed
5/10/2011	3:54:39 PM	SiCl4 pre valve closed
5/10/2011	3:54:39 PM	SiCl4 post valve closed
5/10/2011	3:54:39 PM	Main Vac valve closed
5/10/2011	3:54:39 PM	Bubbler valve closed
5/10/2011	3:54:39 PM	Bypass valve opened
5/10/2011	3:54:39 PM	Helium MFC set to  0.000000
5/10/2011	3:54:39 PM	H2 MFC set to  0.000000
5/10/2011	3:54:39 PM	BCl3 MFC set to  0.000000
5/10/2011	3:54:39 PM	PHl3 MFC set to  0.000000
5/10/2011	3:54:39 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:54:39 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:54:39 PM	Tube furnace set to 0
5/10/2011	3:54:39 PM	Helium valve closed
5/10/2011	3:54:39 PM	H2 valve closed
5/10/2011	3:54:39 PM	BCl3 valve closed
5/10/2011	3:54:39 PM	PH3 valve closed
5/10/2011	3:54:39 PM	SiCl4 pre valve closed
5/10/2011	3:54:39 PM	SiCl4 post valve closed
5/10/2011	3:54:39 PM	Bubbler valve closed
5/10/2011	3:54:39 PM	Main Vac valve opened
5/10/2011	3:54:39 PM	Bypass valve opened
5/10/2011	3:54:39 PM	Helium MFC set to  0.000000
5/10/2011	3:54:39 PM	H2 MFC set to  0.000000
5/10/2011	3:54:39 PM	BCl3 MFC set to  0.000000
5/10/2011	3:54:39 PM	PHl3 MFC set to  0.000000
5/10/2011	3:54:39 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:54:39 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:54:39 PM	Tube furnace set to 0
5/10/2011	3:54:40 PM	Run finished at 3:54 PM
5/10/2011	3:54:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	3:55:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	3:55:14 PM	Recipe started at 3:55 PM
5/10/2011	3:55:14 PM	H2 valve closed
5/10/2011	3:55:14 PM	BCl3 valve closed
5/10/2011	3:55:14 PM	PH3 valve closed
5/10/2011	3:55:14 PM	SiCl4 pre valve closed
5/10/2011	3:55:14 PM	SiCl4 post valve closed
5/10/2011	3:55:14 PM	Main Vac valve closed
5/10/2011	3:55:14 PM	Bypass valve closed
5/10/2011	3:55:14 PM	Bubbler valve closed
5/10/2011	3:55:14 PM	Helium valve opened
5/10/2011	3:55:14 PM	Helium MFC set to  500.000000
5/10/2011	3:55:14 PM	H2 MFC set to  0.000000
5/10/2011	3:55:14 PM	BCl3 MFC set to  0.000000
5/10/2011	3:55:14 PM	PHl3 MFC set to  0.000000
5/10/2011	3:55:14 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:55:14 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:55:14 PM	Tube furnace set to 0
5/10/2011	3:55:22 PM	Helium valve closed
5/10/2011	3:55:22 PM	H2 valve closed
5/10/2011	3:55:22 PM	BCl3 valve closed
5/10/2011	3:55:22 PM	PH3 valve closed
5/10/2011	3:55:22 PM	SiCl4 pre valve closed
5/10/2011	3:55:22 PM	SiCl4 post valve closed
5/10/2011	3:55:22 PM	Main Vac valve closed
5/10/2011	3:55:22 PM	Bypass valve closed
5/10/2011	3:55:22 PM	Bubbler valve closed
5/10/2011	3:55:22 PM	Helium MFC set to  0.000000
5/10/2011	3:55:22 PM	H2 MFC set to  0.000000
5/10/2011	3:55:22 PM	BCl3 MFC set to  0.000000
5/10/2011	3:55:22 PM	PHl3 MFC set to  0.000000
5/10/2011	3:55:22 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:55:22 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:55:22 PM	Tube furnace set to 0
5/10/2011	3:55:22 PM	Run finished at 3:55 PM
5/10/2011	3:55:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	3:55:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	3:55:23 PM	Recipe started at 3:55 PM
5/10/2011	3:55:24 PM	Helium valve closed
5/10/2011	3:55:24 PM	H2 valve closed
5/10/2011	3:55:24 PM	BCl3 valve closed
5/10/2011	3:55:24 PM	PH3 valve closed
5/10/2011	3:55:24 PM	SiCl4 pre valve closed
5/10/2011	3:55:24 PM	SiCl4 post valve closed
5/10/2011	3:55:24 PM	Main Vac valve closed
5/10/2011	3:55:24 PM	Bubbler valve closed
5/10/2011	3:55:24 PM	Bypass valve opened
5/10/2011	3:55:24 PM	Helium MFC set to  0.000000
5/10/2011	3:55:24 PM	H2 MFC set to  0.000000
5/10/2011	3:55:24 PM	BCl3 MFC set to  0.000000
5/10/2011	3:55:24 PM	PHl3 MFC set to  0.000000
5/10/2011	3:55:24 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:55:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:55:24 PM	Tube furnace set to 0
5/10/2011	3:55:29 PM	Helium valve closed
5/10/2011	3:55:29 PM	H2 valve closed
5/10/2011	3:55:29 PM	BCl3 valve closed
5/10/2011	3:55:29 PM	PH3 valve closed
5/10/2011	3:55:29 PM	SiCl4 pre valve closed
5/10/2011	3:55:29 PM	SiCl4 post valve closed
5/10/2011	3:55:29 PM	Bubbler valve closed
5/10/2011	3:55:29 PM	Main Vac valve opened
5/10/2011	3:55:29 PM	Bypass valve opened
5/10/2011	3:55:29 PM	Helium MFC set to  0.000000
5/10/2011	3:55:29 PM	H2 MFC set to  0.000000
5/10/2011	3:55:29 PM	BCl3 MFC set to  0.000000
5/10/2011	3:55:29 PM	PHl3 MFC set to  0.000000
5/10/2011	3:55:29 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:55:29 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:55:29 PM	Tube furnace set to 0
5/10/2011	3:55:29 PM	Run finished at 3:55 PM
5/10/2011	3:55:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	3:59:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	3:59:22 PM	Recipe started at 3:59 PM
5/10/2011	3:59:22 PM	Helium valve closed
5/10/2011	3:59:22 PM	H2 valve closed
5/10/2011	3:59:22 PM	BCl3 valve closed
5/10/2011	3:59:22 PM	PH3 valve closed
5/10/2011	3:59:22 PM	SiCl4 pre valve closed
5/10/2011	3:59:22 PM	SiCl4 post valve closed
5/10/2011	3:59:22 PM	Main Vac valve closed
5/10/2011	3:59:22 PM	Bubbler valve closed
5/10/2011	3:59:22 PM	Bypass valve opened
5/10/2011	3:59:22 PM	Helium MFC set to  0.000000
5/10/2011	3:59:22 PM	H2 MFC set to  0.000000
5/10/2011	3:59:22 PM	BCl3 MFC set to  0.000000
5/10/2011	3:59:22 PM	PHl3 MFC set to  0.000000
5/10/2011	3:59:22 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:59:22 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:59:23 PM	Tube furnace set to 0
5/10/2011	3:59:23 PM	Helium valve closed
5/10/2011	3:59:23 PM	H2 valve closed
5/10/2011	3:59:23 PM	BCl3 valve closed
5/10/2011	3:59:23 PM	PH3 valve closed
5/10/2011	3:59:23 PM	SiCl4 pre valve closed
5/10/2011	3:59:23 PM	SiCl4 post valve closed
5/10/2011	3:59:23 PM	Bubbler valve closed
5/10/2011	3:59:23 PM	Main Vac valve opened
5/10/2011	3:59:23 PM	Bypass valve opened
5/10/2011	3:59:23 PM	Helium MFC set to  0.000000
5/10/2011	3:59:23 PM	H2 MFC set to  0.000000
5/10/2011	3:59:23 PM	BCl3 MFC set to  0.000000
5/10/2011	3:59:23 PM	PHl3 MFC set to  0.000000
5/10/2011	3:59:23 PM	SiCl4 MFC set to  0.000000
5/10/2011	3:59:23 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	3:59:23 PM	Tube furnace set to 0
5/10/2011	4:00:23 PM	H2 valve closed
5/10/2011	4:00:23 PM	BCl3 valve closed
5/10/2011	4:00:23 PM	PH3 valve closed
5/10/2011	4:00:23 PM	SiCl4 pre valve closed
5/10/2011	4:00:23 PM	SiCl4 post valve closed
5/10/2011	4:00:23 PM	Bubbler valve closed
5/10/2011	4:00:23 PM	Helium valve opened
5/10/2011	4:00:23 PM	Main Vac valve opened
5/10/2011	4:00:23 PM	Bypass valve opened
5/10/2011	4:00:23 PM	Helium MFC set to  100.000000
5/10/2011	4:00:23 PM	H2 MFC set to  0.000000
5/10/2011	4:00:23 PM	BCl3 MFC set to  0.000000
5/10/2011	4:00:23 PM	PHl3 MFC set to  0.000000
5/10/2011	4:00:23 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:00:23 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:00:23 PM	Tube furnace set to 0
5/10/2011	4:01:23 PM	Helium valve closed
5/10/2011	4:01:23 PM	H2 valve closed
5/10/2011	4:01:23 PM	BCl3 valve closed
5/10/2011	4:01:23 PM	PH3 valve closed
5/10/2011	4:01:23 PM	SiCl4 pre valve closed
5/10/2011	4:01:23 PM	SiCl4 post valve closed
5/10/2011	4:01:23 PM	Bubbler valve closed
5/10/2011	4:01:23 PM	Main Vac valve opened
5/10/2011	4:01:23 PM	Bypass valve opened
5/10/2011	4:01:23 PM	Helium MFC set to  0.000000
5/10/2011	4:01:23 PM	H2 MFC set to  0.000000
5/10/2011	4:01:23 PM	BCl3 MFC set to  0.000000
5/10/2011	4:01:23 PM	PHl3 MFC set to  0.000000
5/10/2011	4:01:23 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:01:23 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:01:23 PM	Tube furnace set to 0
5/10/2011	4:02:23 PM	H2 valve closed
5/10/2011	4:02:23 PM	BCl3 valve closed
5/10/2011	4:02:23 PM	PH3 valve closed
5/10/2011	4:02:23 PM	SiCl4 pre valve closed
5/10/2011	4:02:23 PM	SiCl4 post valve closed
5/10/2011	4:02:23 PM	Bubbler valve closed
5/10/2011	4:02:23 PM	Helium valve opened
5/10/2011	4:02:23 PM	Main Vac valve opened
5/10/2011	4:02:23 PM	Bypass valve opened
5/10/2011	4:02:23 PM	Helium MFC set to  100.000000
5/10/2011	4:02:23 PM	H2 MFC set to  0.000000
5/10/2011	4:02:23 PM	BCl3 MFC set to  0.000000
5/10/2011	4:02:23 PM	PHl3 MFC set to  0.000000
5/10/2011	4:02:23 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:02:23 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:02:24 PM	Tube furnace set to 0
5/10/2011	4:03:24 PM	Helium valve closed
5/10/2011	4:03:24 PM	H2 valve closed
5/10/2011	4:03:24 PM	BCl3 valve closed
5/10/2011	4:03:24 PM	PH3 valve closed
5/10/2011	4:03:24 PM	SiCl4 pre valve closed
5/10/2011	4:03:24 PM	SiCl4 post valve closed
5/10/2011	4:03:24 PM	Bubbler valve closed
5/10/2011	4:03:24 PM	Main Vac valve opened
5/10/2011	4:03:24 PM	Bypass valve opened
5/10/2011	4:03:24 PM	Helium MFC set to  0.000000
5/10/2011	4:03:24 PM	H2 MFC set to  0.000000
5/10/2011	4:03:24 PM	BCl3 MFC set to  0.000000
5/10/2011	4:03:24 PM	PHl3 MFC set to  0.000000
5/10/2011	4:03:24 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:03:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:03:24 PM	Tube furnace set to 0
5/10/2011	4:04:24 PM	H2 valve closed
5/10/2011	4:04:24 PM	BCl3 valve closed
5/10/2011	4:04:24 PM	PH3 valve closed
5/10/2011	4:04:24 PM	SiCl4 pre valve closed
5/10/2011	4:04:24 PM	SiCl4 post valve closed
5/10/2011	4:04:24 PM	Bubbler valve closed
5/10/2011	4:04:24 PM	Helium valve opened
5/10/2011	4:04:24 PM	Main Vac valve opened
5/10/2011	4:04:24 PM	Bypass valve opened
5/10/2011	4:04:24 PM	Helium MFC set to  100.000000
5/10/2011	4:04:24 PM	H2 MFC set to  0.000000
5/10/2011	4:04:24 PM	BCl3 MFC set to  0.000000
5/10/2011	4:04:24 PM	PHl3 MFC set to  0.000000
5/10/2011	4:04:24 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:04:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:04:24 PM	Tube furnace set to 0
5/10/2011	4:05:24 PM	Helium valve closed
5/10/2011	4:05:24 PM	H2 valve closed
5/10/2011	4:05:24 PM	BCl3 valve closed
5/10/2011	4:05:24 PM	PH3 valve closed
5/10/2011	4:05:24 PM	SiCl4 pre valve closed
5/10/2011	4:05:24 PM	SiCl4 post valve closed
5/10/2011	4:05:24 PM	Bubbler valve closed
5/10/2011	4:05:24 PM	Main Vac valve opened
5/10/2011	4:05:24 PM	Bypass valve opened
5/10/2011	4:05:24 PM	Helium MFC set to  0.000000
5/10/2011	4:05:24 PM	H2 MFC set to  0.000000
5/10/2011	4:05:24 PM	BCl3 MFC set to  0.000000
5/10/2011	4:05:24 PM	PHl3 MFC set to  0.000000
5/10/2011	4:05:24 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:05:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:05:24 PM	Tube furnace set to 0
5/10/2011	4:06:24 PM	H2 valve closed
5/10/2011	4:06:24 PM	BCl3 valve closed
5/10/2011	4:06:24 PM	PH3 valve closed
5/10/2011	4:06:24 PM	SiCl4 pre valve closed
5/10/2011	4:06:24 PM	SiCl4 post valve closed
5/10/2011	4:06:24 PM	Bubbler valve closed
5/10/2011	4:06:24 PM	Helium valve opened
5/10/2011	4:06:24 PM	Main Vac valve opened
5/10/2011	4:06:24 PM	Bypass valve opened
5/10/2011	4:06:24 PM	Helium MFC set to  100.000000
5/10/2011	4:06:24 PM	H2 MFC set to  0.000000
5/10/2011	4:06:24 PM	BCl3 MFC set to  0.000000
5/10/2011	4:06:24 PM	PHl3 MFC set to  0.000000
5/10/2011	4:06:24 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:06:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:06:24 PM	Tube furnace set to 0
5/10/2011	4:07:24 PM	Helium valve closed
5/10/2011	4:07:24 PM	H2 valve closed
5/10/2011	4:07:24 PM	BCl3 valve closed
5/10/2011	4:07:24 PM	PH3 valve closed
5/10/2011	4:07:24 PM	SiCl4 pre valve closed
5/10/2011	4:07:24 PM	SiCl4 post valve closed
5/10/2011	4:07:24 PM	Bubbler valve closed
5/10/2011	4:07:24 PM	Main Vac valve opened
5/10/2011	4:07:24 PM	Bypass valve opened
5/10/2011	4:07:24 PM	Helium MFC set to  0.000000
5/10/2011	4:07:24 PM	H2 MFC set to  0.000000
5/10/2011	4:07:24 PM	BCl3 MFC set to  0.000000
5/10/2011	4:07:24 PM	PHl3 MFC set to  0.000000
5/10/2011	4:07:24 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:07:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:07:25 PM	Tube furnace set to 0
5/10/2011	4:08:25 PM	H2 valve closed
5/10/2011	4:08:25 PM	BCl3 valve closed
5/10/2011	4:08:25 PM	PH3 valve closed
5/10/2011	4:08:25 PM	SiCl4 pre valve closed
5/10/2011	4:08:25 PM	SiCl4 post valve closed
5/10/2011	4:08:25 PM	Bubbler valve closed
5/10/2011	4:08:25 PM	Helium valve opened
5/10/2011	4:08:25 PM	Main Vac valve opened
5/10/2011	4:08:25 PM	Bypass valve opened
5/10/2011	4:08:25 PM	Helium MFC set to  100.000000
5/10/2011	4:08:25 PM	H2 MFC set to  0.000000
5/10/2011	4:08:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:08:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:08:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:08:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:08:25 PM	Tube furnace set to 0
5/10/2011	4:09:25 PM	Helium valve closed
5/10/2011	4:09:25 PM	H2 valve closed
5/10/2011	4:09:25 PM	BCl3 valve closed
5/10/2011	4:09:25 PM	PH3 valve closed
5/10/2011	4:09:25 PM	SiCl4 pre valve closed
5/10/2011	4:09:25 PM	SiCl4 post valve closed
5/10/2011	4:09:25 PM	Bubbler valve closed
5/10/2011	4:09:25 PM	Main Vac valve opened
5/10/2011	4:09:25 PM	Bypass valve opened
5/10/2011	4:09:25 PM	Helium MFC set to  0.000000
5/10/2011	4:09:25 PM	H2 MFC set to  0.000000
5/10/2011	4:09:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:09:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:09:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:09:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:09:25 PM	Tube furnace set to 0
5/10/2011	4:10:25 PM	H2 valve closed
5/10/2011	4:10:25 PM	BCl3 valve closed
5/10/2011	4:10:25 PM	PH3 valve closed
5/10/2011	4:10:25 PM	SiCl4 pre valve closed
5/10/2011	4:10:25 PM	SiCl4 post valve closed
5/10/2011	4:10:25 PM	Bubbler valve closed
5/10/2011	4:10:25 PM	Helium valve opened
5/10/2011	4:10:25 PM	Main Vac valve opened
5/10/2011	4:10:25 PM	Bypass valve opened
5/10/2011	4:10:25 PM	Helium MFC set to  100.000000
5/10/2011	4:10:25 PM	H2 MFC set to  0.000000
5/10/2011	4:10:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:10:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:10:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:10:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:10:25 PM	Tube furnace set to 0
5/10/2011	4:11:25 PM	Helium valve closed
5/10/2011	4:11:25 PM	H2 valve closed
5/10/2011	4:11:25 PM	BCl3 valve closed
5/10/2011	4:11:25 PM	PH3 valve closed
5/10/2011	4:11:25 PM	SiCl4 pre valve closed
5/10/2011	4:11:25 PM	SiCl4 post valve closed
5/10/2011	4:11:25 PM	Bubbler valve closed
5/10/2011	4:11:25 PM	Main Vac valve opened
5/10/2011	4:11:25 PM	Bypass valve opened
5/10/2011	4:11:25 PM	Helium MFC set to  0.000000
5/10/2011	4:11:25 PM	H2 MFC set to  0.000000
5/10/2011	4:11:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:11:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:11:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:11:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:11:25 PM	Tube furnace set to 0
5/10/2011	4:12:25 PM	H2 valve closed
5/10/2011	4:12:25 PM	BCl3 valve closed
5/10/2011	4:12:25 PM	PH3 valve closed
5/10/2011	4:12:25 PM	SiCl4 pre valve closed
5/10/2011	4:12:25 PM	SiCl4 post valve closed
5/10/2011	4:12:25 PM	Bubbler valve closed
5/10/2011	4:12:25 PM	Helium valve opened
5/10/2011	4:12:25 PM	Main Vac valve opened
5/10/2011	4:12:26 PM	Bypass valve opened
5/10/2011	4:12:26 PM	Helium MFC set to  100.000000
5/10/2011	4:12:26 PM	H2 MFC set to  0.000000
5/10/2011	4:12:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:12:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:12:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:12:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:12:26 PM	Tube furnace set to 0
5/10/2011	4:13:26 PM	Helium valve closed
5/10/2011	4:13:26 PM	H2 valve closed
5/10/2011	4:13:26 PM	BCl3 valve closed
5/10/2011	4:13:26 PM	PH3 valve closed
5/10/2011	4:13:26 PM	SiCl4 pre valve closed
5/10/2011	4:13:26 PM	SiCl4 post valve closed
5/10/2011	4:13:26 PM	Bubbler valve closed
5/10/2011	4:13:26 PM	Main Vac valve opened
5/10/2011	4:13:26 PM	Bypass valve opened
5/10/2011	4:13:26 PM	Helium MFC set to  0.000000
5/10/2011	4:13:26 PM	H2 MFC set to  0.000000
5/10/2011	4:13:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:13:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:13:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:13:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:13:26 PM	Tube furnace set to 0
5/10/2011	4:14:26 PM	H2 valve closed
5/10/2011	4:14:26 PM	BCl3 valve closed
5/10/2011	4:14:26 PM	PH3 valve closed
5/10/2011	4:14:26 PM	SiCl4 pre valve closed
5/10/2011	4:14:26 PM	SiCl4 post valve closed
5/10/2011	4:14:26 PM	Bubbler valve closed
5/10/2011	4:14:26 PM	Helium valve opened
5/10/2011	4:14:26 PM	Main Vac valve opened
5/10/2011	4:14:26 PM	Bypass valve opened
5/10/2011	4:14:26 PM	Helium MFC set to  100.000000
5/10/2011	4:14:26 PM	H2 MFC set to  0.000000
5/10/2011	4:14:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:14:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:14:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:14:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:14:26 PM	Tube furnace set to 0
5/10/2011	4:15:26 PM	Helium valve closed
5/10/2011	4:15:26 PM	H2 valve closed
5/10/2011	4:15:26 PM	BCl3 valve closed
5/10/2011	4:15:26 PM	PH3 valve closed
5/10/2011	4:15:26 PM	SiCl4 pre valve closed
5/10/2011	4:15:26 PM	SiCl4 post valve closed
5/10/2011	4:15:26 PM	Bubbler valve closed
5/10/2011	4:15:26 PM	Main Vac valve opened
5/10/2011	4:15:26 PM	Bypass valve opened
5/10/2011	4:15:26 PM	Helium MFC set to  0.000000
5/10/2011	4:15:26 PM	H2 MFC set to  0.000000
5/10/2011	4:15:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:15:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:15:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:15:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:15:26 PM	Tube furnace set to 0
5/10/2011	4:16:26 PM	H2 valve closed
5/10/2011	4:16:26 PM	BCl3 valve closed
5/10/2011	4:16:26 PM	PH3 valve closed
5/10/2011	4:16:26 PM	SiCl4 pre valve closed
5/10/2011	4:16:26 PM	SiCl4 post valve closed
5/10/2011	4:16:26 PM	Bubbler valve closed
5/10/2011	4:16:26 PM	Helium valve opened
5/10/2011	4:16:26 PM	Main Vac valve opened
5/10/2011	4:16:26 PM	Bypass valve opened
5/10/2011	4:16:26 PM	Helium MFC set to  100.000000
5/10/2011	4:16:26 PM	H2 MFC set to  0.000000
5/10/2011	4:16:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:16:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:16:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:16:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:16:26 PM	Tube furnace set to 0
5/10/2011	4:17:26 PM	Helium valve closed
5/10/2011	4:17:26 PM	H2 valve closed
5/10/2011	4:17:26 PM	BCl3 valve closed
5/10/2011	4:17:27 PM	PH3 valve closed
5/10/2011	4:17:27 PM	SiCl4 pre valve closed
5/10/2011	4:17:27 PM	SiCl4 post valve closed
5/10/2011	4:17:27 PM	Bubbler valve closed
5/10/2011	4:17:27 PM	Main Vac valve opened
5/10/2011	4:17:27 PM	Bypass valve opened
5/10/2011	4:17:27 PM	Helium MFC set to  0.000000
5/10/2011	4:17:27 PM	H2 MFC set to  0.000000
5/10/2011	4:17:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:17:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:17:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:17:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:17:27 PM	Tube furnace set to 0
5/10/2011	4:18:27 PM	H2 valve closed
5/10/2011	4:18:27 PM	BCl3 valve closed
5/10/2011	4:18:27 PM	PH3 valve closed
5/10/2011	4:18:27 PM	SiCl4 pre valve closed
5/10/2011	4:18:27 PM	SiCl4 post valve closed
5/10/2011	4:18:27 PM	Bubbler valve closed
5/10/2011	4:18:27 PM	Helium valve opened
5/10/2011	4:18:27 PM	Main Vac valve opened
5/10/2011	4:18:27 PM	Bypass valve opened
5/10/2011	4:18:27 PM	Helium MFC set to  100.000000
5/10/2011	4:18:27 PM	H2 MFC set to  0.000000
5/10/2011	4:18:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:18:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:18:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:18:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:18:27 PM	Tube furnace set to 0
5/10/2011	4:19:27 PM	Helium valve closed
5/10/2011	4:19:27 PM	H2 valve closed
5/10/2011	4:19:27 PM	BCl3 valve closed
5/10/2011	4:19:27 PM	PH3 valve closed
5/10/2011	4:19:27 PM	SiCl4 pre valve closed
5/10/2011	4:19:27 PM	SiCl4 post valve closed
5/10/2011	4:19:27 PM	Bubbler valve closed
5/10/2011	4:19:27 PM	Main Vac valve opened
5/10/2011	4:19:27 PM	Bypass valve opened
5/10/2011	4:19:27 PM	Helium MFC set to  0.000000
5/10/2011	4:19:27 PM	H2 MFC set to  0.000000
5/10/2011	4:19:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:19:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:19:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:19:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:19:27 PM	Tube furnace set to 0
5/10/2011	4:19:28 PM	Run finished at 4:19 PM
5/10/2011	4:19:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	4:21:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	4:21:36 PM	Recipe started at 4:21 PM
5/10/2011	4:21:36 PM	H2 valve closed
5/10/2011	4:21:36 PM	BCl3 valve closed
5/10/2011	4:21:36 PM	PH3 valve closed
5/10/2011	4:21:36 PM	SiCl4 pre valve closed
5/10/2011	4:21:36 PM	SiCl4 post valve closed
5/10/2011	4:21:36 PM	Main Vac valve closed
5/10/2011	4:21:36 PM	Bypass valve closed
5/10/2011	4:21:36 PM	Bubbler valve closed
5/10/2011	4:21:36 PM	Helium valve opened
5/10/2011	4:21:36 PM	Helium MFC set to  500.000000
5/10/2011	4:21:36 PM	H2 MFC set to  0.000000
5/10/2011	4:21:36 PM	BCl3 MFC set to  0.000000
5/10/2011	4:21:36 PM	PHl3 MFC set to  0.000000
5/10/2011	4:21:36 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:21:36 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:21:37 PM	Tube furnace set to 0
5/10/2011	4:21:50 PM	Helium valve closed
5/10/2011	4:21:50 PM	H2 valve closed
5/10/2011	4:21:50 PM	BCl3 valve closed
5/10/2011	4:21:50 PM	PH3 valve closed
5/10/2011	4:21:50 PM	SiCl4 pre valve closed
5/10/2011	4:21:50 PM	SiCl4 post valve closed
5/10/2011	4:21:50 PM	Main Vac valve closed
5/10/2011	4:21:50 PM	Bypass valve closed
5/10/2011	4:21:50 PM	Bubbler valve closed
5/10/2011	4:21:50 PM	Helium MFC set to  0.000000
5/10/2011	4:21:50 PM	H2 MFC set to  0.000000
5/10/2011	4:21:50 PM	BCl3 MFC set to  0.000000
5/10/2011	4:21:50 PM	PHl3 MFC set to  0.000000
5/10/2011	4:21:50 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:21:50 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:21:50 PM	Tube furnace set to 0
5/10/2011	4:21:50 PM	Run finished at 4:21 PM
5/10/2011	4:21:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	4:21:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	4:21:53 PM	Recipe started at 4:21 PM
5/10/2011	4:21:53 PM	Helium valve closed
5/10/2011	4:21:53 PM	H2 valve closed
5/10/2011	4:21:53 PM	BCl3 valve closed
5/10/2011	4:21:53 PM	PH3 valve closed
5/10/2011	4:21:53 PM	SiCl4 pre valve closed
5/10/2011	4:21:53 PM	SiCl4 post valve closed
5/10/2011	4:21:53 PM	Main Vac valve closed
5/10/2011	4:21:53 PM	Bubbler valve closed
5/10/2011	4:21:53 PM	Bypass valve opened
5/10/2011	4:21:53 PM	Helium MFC set to  0.000000
5/10/2011	4:21:53 PM	H2 MFC set to  0.000000
5/10/2011	4:21:53 PM	BCl3 MFC set to  0.000000
5/10/2011	4:21:53 PM	PHl3 MFC set to  0.000000
5/10/2011	4:21:53 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:21:53 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:21:53 PM	Tube furnace set to 0
5/10/2011	4:22:03 PM	Helium valve closed
5/10/2011	4:22:03 PM	H2 valve closed
5/10/2011	4:22:03 PM	BCl3 valve closed
5/10/2011	4:22:03 PM	PH3 valve closed
5/10/2011	4:22:03 PM	SiCl4 pre valve closed
5/10/2011	4:22:03 PM	SiCl4 post valve closed
5/10/2011	4:22:03 PM	Bubbler valve closed
5/10/2011	4:22:03 PM	Main Vac valve opened
5/10/2011	4:22:03 PM	Bypass valve opened
5/10/2011	4:22:03 PM	Helium MFC set to  0.000000
5/10/2011	4:22:03 PM	H2 MFC set to  0.000000
5/10/2011	4:22:03 PM	BCl3 MFC set to  0.000000
5/10/2011	4:22:03 PM	PHl3 MFC set to  0.000000
5/10/2011	4:22:03 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:22:03 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:22:04 PM	Tube furnace set to 0
5/10/2011	4:22:04 PM	Run finished at 4:22 PM
5/10/2011	4:22:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	4:23:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	4:23:24 PM	Recipe started at 4:23 PM
5/10/2011	4:23:24 PM	Helium valve closed
5/10/2011	4:23:24 PM	H2 valve closed
5/10/2011	4:23:24 PM	BCl3 valve closed
5/10/2011	4:23:24 PM	PH3 valve closed
5/10/2011	4:23:24 PM	SiCl4 pre valve closed
5/10/2011	4:23:24 PM	SiCl4 post valve closed
5/10/2011	4:23:24 PM	Main Vac valve closed
5/10/2011	4:23:24 PM	Bubbler valve closed
5/10/2011	4:23:24 PM	Bypass valve opened
5/10/2011	4:23:24 PM	Helium MFC set to  0.000000
5/10/2011	4:23:24 PM	H2 MFC set to  0.000000
5/10/2011	4:23:24 PM	BCl3 MFC set to  0.000000
5/10/2011	4:23:24 PM	PHl3 MFC set to  0.000000
5/10/2011	4:23:24 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:23:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:23:24 PM	Tube furnace set to 0
5/10/2011	4:23:25 PM	Helium valve closed
5/10/2011	4:23:25 PM	H2 valve closed
5/10/2011	4:23:25 PM	BCl3 valve closed
5/10/2011	4:23:25 PM	PH3 valve closed
5/10/2011	4:23:25 PM	SiCl4 pre valve closed
5/10/2011	4:23:25 PM	SiCl4 post valve closed
5/10/2011	4:23:25 PM	Bubbler valve closed
5/10/2011	4:23:25 PM	Main Vac valve opened
5/10/2011	4:23:25 PM	Bypass valve opened
5/10/2011	4:23:25 PM	Helium MFC set to  0.000000
5/10/2011	4:23:25 PM	H2 MFC set to  0.000000
5/10/2011	4:23:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:23:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:23:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:23:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:23:25 PM	Tube furnace set to 0
5/10/2011	4:24:25 PM	H2 valve closed
5/10/2011	4:24:25 PM	BCl3 valve closed
5/10/2011	4:24:25 PM	PH3 valve closed
5/10/2011	4:24:25 PM	SiCl4 pre valve closed
5/10/2011	4:24:25 PM	SiCl4 post valve closed
5/10/2011	4:24:25 PM	Bubbler valve closed
5/10/2011	4:24:25 PM	Helium valve opened
5/10/2011	4:24:25 PM	Main Vac valve opened
5/10/2011	4:24:25 PM	Bypass valve opened
5/10/2011	4:24:25 PM	Helium MFC set to  100.000000
5/10/2011	4:24:25 PM	H2 MFC set to  0.000000
5/10/2011	4:24:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:24:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:24:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:24:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:24:25 PM	Tube furnace set to 0
5/10/2011	4:25:25 PM	Helium valve closed
5/10/2011	4:25:25 PM	H2 valve closed
5/10/2011	4:25:25 PM	BCl3 valve closed
5/10/2011	4:25:25 PM	PH3 valve closed
5/10/2011	4:25:25 PM	SiCl4 pre valve closed
5/10/2011	4:25:25 PM	SiCl4 post valve closed
5/10/2011	4:25:25 PM	Bubbler valve closed
5/10/2011	4:25:25 PM	Main Vac valve opened
5/10/2011	4:25:25 PM	Bypass valve opened
5/10/2011	4:25:25 PM	Helium MFC set to  0.000000
5/10/2011	4:25:25 PM	H2 MFC set to  0.000000
5/10/2011	4:25:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:25:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:25:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:25:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:25:25 PM	Tube furnace set to 0
5/10/2011	4:26:25 PM	H2 valve closed
5/10/2011	4:26:25 PM	BCl3 valve closed
5/10/2011	4:26:25 PM	PH3 valve closed
5/10/2011	4:26:25 PM	SiCl4 pre valve closed
5/10/2011	4:26:25 PM	SiCl4 post valve closed
5/10/2011	4:26:25 PM	Bubbler valve closed
5/10/2011	4:26:25 PM	Helium valve opened
5/10/2011	4:26:25 PM	Main Vac valve opened
5/10/2011	4:26:25 PM	Bypass valve opened
5/10/2011	4:26:25 PM	Helium MFC set to  100.000000
5/10/2011	4:26:25 PM	H2 MFC set to  0.000000
5/10/2011	4:26:25 PM	BCl3 MFC set to  0.000000
5/10/2011	4:26:25 PM	PHl3 MFC set to  0.000000
5/10/2011	4:26:25 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:26:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:26:26 PM	Tube furnace set to 0
5/10/2011	4:27:26 PM	Helium valve closed
5/10/2011	4:27:26 PM	H2 valve closed
5/10/2011	4:27:26 PM	BCl3 valve closed
5/10/2011	4:27:26 PM	PH3 valve closed
5/10/2011	4:27:26 PM	SiCl4 pre valve closed
5/10/2011	4:27:26 PM	SiCl4 post valve closed
5/10/2011	4:27:26 PM	Bubbler valve closed
5/10/2011	4:27:26 PM	Main Vac valve opened
5/10/2011	4:27:26 PM	Bypass valve opened
5/10/2011	4:27:26 PM	Helium MFC set to  0.000000
5/10/2011	4:27:26 PM	H2 MFC set to  0.000000
5/10/2011	4:27:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:27:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:27:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:27:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:27:26 PM	Tube furnace set to 0
5/10/2011	4:28:26 PM	H2 valve closed
5/10/2011	4:28:26 PM	BCl3 valve closed
5/10/2011	4:28:26 PM	PH3 valve closed
5/10/2011	4:28:26 PM	SiCl4 pre valve closed
5/10/2011	4:28:26 PM	SiCl4 post valve closed
5/10/2011	4:28:26 PM	Bubbler valve closed
5/10/2011	4:28:26 PM	Helium valve opened
5/10/2011	4:28:26 PM	Main Vac valve opened
5/10/2011	4:28:26 PM	Bypass valve opened
5/10/2011	4:28:26 PM	Helium MFC set to  100.000000
5/10/2011	4:28:26 PM	H2 MFC set to  0.000000
5/10/2011	4:28:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:28:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:28:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:28:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:28:26 PM	Tube furnace set to 0
5/10/2011	4:29:26 PM	Helium valve closed
5/10/2011	4:29:26 PM	H2 valve closed
5/10/2011	4:29:26 PM	BCl3 valve closed
5/10/2011	4:29:26 PM	PH3 valve closed
5/10/2011	4:29:26 PM	SiCl4 pre valve closed
5/10/2011	4:29:26 PM	SiCl4 post valve closed
5/10/2011	4:29:26 PM	Bubbler valve closed
5/10/2011	4:29:26 PM	Main Vac valve opened
5/10/2011	4:29:26 PM	Bypass valve opened
5/10/2011	4:29:26 PM	Helium MFC set to  0.000000
5/10/2011	4:29:26 PM	H2 MFC set to  0.000000
5/10/2011	4:29:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:29:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:29:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:29:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:29:26 PM	Tube furnace set to 0
5/10/2011	4:30:26 PM	H2 valve closed
5/10/2011	4:30:26 PM	BCl3 valve closed
5/10/2011	4:30:26 PM	PH3 valve closed
5/10/2011	4:30:26 PM	SiCl4 pre valve closed
5/10/2011	4:30:26 PM	SiCl4 post valve closed
5/10/2011	4:30:26 PM	Bubbler valve closed
5/10/2011	4:30:26 PM	Helium valve opened
5/10/2011	4:30:26 PM	Main Vac valve opened
5/10/2011	4:30:26 PM	Bypass valve opened
5/10/2011	4:30:26 PM	Helium MFC set to  100.000000
5/10/2011	4:30:26 PM	H2 MFC set to  0.000000
5/10/2011	4:30:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:30:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:30:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:30:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:30:26 PM	Tube furnace set to 0
5/10/2011	4:31:26 PM	Helium valve closed
5/10/2011	4:31:26 PM	H2 valve closed
5/10/2011	4:31:26 PM	BCl3 valve closed
5/10/2011	4:31:26 PM	PH3 valve closed
5/10/2011	4:31:26 PM	SiCl4 pre valve closed
5/10/2011	4:31:26 PM	SiCl4 post valve closed
5/10/2011	4:31:26 PM	Bubbler valve closed
5/10/2011	4:31:26 PM	Main Vac valve opened
5/10/2011	4:31:26 PM	Bypass valve opened
5/10/2011	4:31:26 PM	Helium MFC set to  0.000000
5/10/2011	4:31:26 PM	H2 MFC set to  0.000000
5/10/2011	4:31:26 PM	BCl3 MFC set to  0.000000
5/10/2011	4:31:26 PM	PHl3 MFC set to  0.000000
5/10/2011	4:31:26 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:31:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:31:27 PM	Tube furnace set to 0
5/10/2011	4:32:27 PM	H2 valve closed
5/10/2011	4:32:27 PM	BCl3 valve closed
5/10/2011	4:32:27 PM	PH3 valve closed
5/10/2011	4:32:27 PM	SiCl4 pre valve closed
5/10/2011	4:32:27 PM	SiCl4 post valve closed
5/10/2011	4:32:27 PM	Bubbler valve closed
5/10/2011	4:32:27 PM	Helium valve opened
5/10/2011	4:32:27 PM	Main Vac valve opened
5/10/2011	4:32:27 PM	Bypass valve opened
5/10/2011	4:32:27 PM	Helium MFC set to  100.000000
5/10/2011	4:32:27 PM	H2 MFC set to  0.000000
5/10/2011	4:32:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:32:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:32:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:32:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:32:27 PM	Tube furnace set to 0
5/10/2011	4:33:27 PM	Helium valve closed
5/10/2011	4:33:27 PM	H2 valve closed
5/10/2011	4:33:27 PM	BCl3 valve closed
5/10/2011	4:33:27 PM	PH3 valve closed
5/10/2011	4:33:27 PM	SiCl4 pre valve closed
5/10/2011	4:33:27 PM	SiCl4 post valve closed
5/10/2011	4:33:27 PM	Bubbler valve closed
5/10/2011	4:33:27 PM	Main Vac valve opened
5/10/2011	4:33:27 PM	Bypass valve opened
5/10/2011	4:33:27 PM	Helium MFC set to  0.000000
5/10/2011	4:33:27 PM	H2 MFC set to  0.000000
5/10/2011	4:33:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:33:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:33:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:33:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:33:27 PM	Tube furnace set to 0
5/10/2011	4:34:27 PM	H2 valve closed
5/10/2011	4:34:27 PM	BCl3 valve closed
5/10/2011	4:34:27 PM	PH3 valve closed
5/10/2011	4:34:27 PM	SiCl4 pre valve closed
5/10/2011	4:34:27 PM	SiCl4 post valve closed
5/10/2011	4:34:27 PM	Bubbler valve closed
5/10/2011	4:34:27 PM	Helium valve opened
5/10/2011	4:34:27 PM	Main Vac valve opened
5/10/2011	4:34:27 PM	Bypass valve opened
5/10/2011	4:34:27 PM	Helium MFC set to  100.000000
5/10/2011	4:34:27 PM	H2 MFC set to  0.000000
5/10/2011	4:34:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:34:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:34:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:34:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:34:27 PM	Tube furnace set to 0
5/10/2011	4:35:27 PM	Helium valve closed
5/10/2011	4:35:27 PM	H2 valve closed
5/10/2011	4:35:27 PM	BCl3 valve closed
5/10/2011	4:35:27 PM	PH3 valve closed
5/10/2011	4:35:27 PM	SiCl4 pre valve closed
5/10/2011	4:35:27 PM	SiCl4 post valve closed
5/10/2011	4:35:27 PM	Bubbler valve closed
5/10/2011	4:35:27 PM	Main Vac valve opened
5/10/2011	4:35:27 PM	Bypass valve opened
5/10/2011	4:35:27 PM	Helium MFC set to  0.000000
5/10/2011	4:35:27 PM	H2 MFC set to  0.000000
5/10/2011	4:35:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:35:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:35:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:35:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:35:27 PM	Tube furnace set to 0
5/10/2011	4:36:27 PM	H2 valve closed
5/10/2011	4:36:27 PM	BCl3 valve closed
5/10/2011	4:36:27 PM	PH3 valve closed
5/10/2011	4:36:27 PM	SiCl4 pre valve closed
5/10/2011	4:36:27 PM	SiCl4 post valve closed
5/10/2011	4:36:27 PM	Bubbler valve closed
5/10/2011	4:36:27 PM	Helium valve opened
5/10/2011	4:36:27 PM	Main Vac valve opened
5/10/2011	4:36:27 PM	Bypass valve opened
5/10/2011	4:36:27 PM	Helium MFC set to  100.000000
5/10/2011	4:36:27 PM	H2 MFC set to  0.000000
5/10/2011	4:36:27 PM	BCl3 MFC set to  0.000000
5/10/2011	4:36:27 PM	PHl3 MFC set to  0.000000
5/10/2011	4:36:27 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:36:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:36:27 PM	Tube furnace set to 0
5/10/2011	4:37:28 PM	Helium valve closed
5/10/2011	4:37:28 PM	H2 valve closed
5/10/2011	4:37:28 PM	BCl3 valve closed
5/10/2011	4:37:28 PM	PH3 valve closed
5/10/2011	4:37:28 PM	SiCl4 pre valve closed
5/10/2011	4:37:28 PM	SiCl4 post valve closed
5/10/2011	4:37:28 PM	Bubbler valve closed
5/10/2011	4:37:28 PM	Main Vac valve opened
5/10/2011	4:37:28 PM	Bypass valve opened
5/10/2011	4:37:28 PM	Helium MFC set to  0.000000
5/10/2011	4:37:28 PM	H2 MFC set to  0.000000
5/10/2011	4:37:28 PM	BCl3 MFC set to  0.000000
5/10/2011	4:37:28 PM	PHl3 MFC set to  0.000000
5/10/2011	4:37:28 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:37:28 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:37:28 PM	Tube furnace set to 0
5/10/2011	4:38:28 PM	H2 valve closed
5/10/2011	4:38:28 PM	BCl3 valve closed
5/10/2011	4:38:28 PM	PH3 valve closed
5/10/2011	4:38:28 PM	SiCl4 pre valve closed
5/10/2011	4:38:28 PM	SiCl4 post valve closed
5/10/2011	4:38:28 PM	Bubbler valve closed
5/10/2011	4:38:28 PM	Helium valve opened
5/10/2011	4:38:28 PM	Main Vac valve opened
5/10/2011	4:38:28 PM	Bypass valve opened
5/10/2011	4:38:28 PM	Helium MFC set to  100.000000
5/10/2011	4:38:28 PM	H2 MFC set to  0.000000
5/10/2011	4:38:28 PM	BCl3 MFC set to  0.000000
5/10/2011	4:38:28 PM	PHl3 MFC set to  0.000000
5/10/2011	4:38:28 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:38:28 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:38:28 PM	Tube furnace set to 0
5/10/2011	4:39:28 PM	Helium valve closed
5/10/2011	4:39:28 PM	H2 valve closed
5/10/2011	4:39:28 PM	BCl3 valve closed
5/10/2011	4:39:28 PM	PH3 valve closed
5/10/2011	4:39:28 PM	SiCl4 pre valve closed
5/10/2011	4:39:28 PM	SiCl4 post valve closed
5/10/2011	4:39:28 PM	Bubbler valve closed
5/10/2011	4:39:28 PM	Main Vac valve opened
5/10/2011	4:39:28 PM	Bypass valve opened
5/10/2011	4:39:28 PM	Helium MFC set to  0.000000
5/10/2011	4:39:28 PM	H2 MFC set to  0.000000
5/10/2011	4:39:28 PM	BCl3 MFC set to  0.000000
5/10/2011	4:39:28 PM	PHl3 MFC set to  0.000000
5/10/2011	4:39:28 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:39:28 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:39:28 PM	Tube furnace set to 0
5/10/2011	4:40:28 PM	H2 valve closed
5/10/2011	4:40:28 PM	BCl3 valve closed
5/10/2011	4:40:28 PM	PH3 valve closed
5/10/2011	4:40:28 PM	SiCl4 pre valve closed
5/10/2011	4:40:28 PM	SiCl4 post valve closed
5/10/2011	4:40:28 PM	Bubbler valve closed
5/10/2011	4:40:28 PM	Helium valve opened
5/10/2011	4:40:28 PM	Main Vac valve opened
5/10/2011	4:40:28 PM	Bypass valve opened
5/10/2011	4:40:28 PM	Helium MFC set to  100.000000
5/10/2011	4:40:28 PM	H2 MFC set to  0.000000
5/10/2011	4:40:28 PM	BCl3 MFC set to  0.000000
5/10/2011	4:40:28 PM	PHl3 MFC set to  0.000000
5/10/2011	4:40:28 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:40:28 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:40:28 PM	Tube furnace set to 0
5/10/2011	4:41:28 PM	Helium valve closed
5/10/2011	4:41:28 PM	H2 valve closed
5/10/2011	4:41:28 PM	BCl3 valve closed
5/10/2011	4:41:28 PM	PH3 valve closed
5/10/2011	4:41:28 PM	SiCl4 pre valve closed
5/10/2011	4:41:28 PM	SiCl4 post valve closed
5/10/2011	4:41:28 PM	Bubbler valve closed
5/10/2011	4:41:28 PM	Main Vac valve opened
5/10/2011	4:41:28 PM	Bypass valve opened
5/10/2011	4:41:28 PM	Helium MFC set to  0.000000
5/10/2011	4:41:28 PM	H2 MFC set to  0.000000
5/10/2011	4:41:28 PM	BCl3 MFC set to  0.000000
5/10/2011	4:41:28 PM	PHl3 MFC set to  0.000000
5/10/2011	4:41:28 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:41:28 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:41:29 PM	Tube furnace set to 0
5/10/2011	4:42:29 PM	H2 valve closed
5/10/2011	4:42:29 PM	BCl3 valve closed
5/10/2011	4:42:29 PM	PH3 valve closed
5/10/2011	4:42:29 PM	SiCl4 pre valve closed
5/10/2011	4:42:29 PM	SiCl4 post valve closed
5/10/2011	4:42:29 PM	Bubbler valve closed
5/10/2011	4:42:29 PM	Helium valve opened
5/10/2011	4:42:29 PM	Main Vac valve opened
5/10/2011	4:42:29 PM	Bypass valve opened
5/10/2011	4:42:29 PM	Helium MFC set to  100.000000
5/10/2011	4:42:29 PM	H2 MFC set to  0.000000
5/10/2011	4:42:29 PM	BCl3 MFC set to  0.000000
5/10/2011	4:42:29 PM	PHl3 MFC set to  0.000000
5/10/2011	4:42:29 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:42:29 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:42:29 PM	Tube furnace set to 0
5/10/2011	4:43:29 PM	Helium valve closed
5/10/2011	4:43:29 PM	H2 valve closed
5/10/2011	4:43:29 PM	BCl3 valve closed
5/10/2011	4:43:29 PM	PH3 valve closed
5/10/2011	4:43:29 PM	SiCl4 pre valve closed
5/10/2011	4:43:29 PM	SiCl4 post valve closed
5/10/2011	4:43:29 PM	Bubbler valve closed
5/10/2011	4:43:29 PM	Main Vac valve opened
5/10/2011	4:43:29 PM	Bypass valve opened
5/10/2011	4:43:29 PM	Helium MFC set to  0.000000
5/10/2011	4:43:29 PM	H2 MFC set to  0.000000
5/10/2011	4:43:29 PM	BCl3 MFC set to  0.000000
5/10/2011	4:43:29 PM	PHl3 MFC set to  0.000000
5/10/2011	4:43:29 PM	SiCl4 MFC set to  0.000000
5/10/2011	4:43:29 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	4:43:29 PM	Tube furnace set to 0
5/10/2011	4:43:30 PM	Run finished at 4:43 PM
5/10/2011	4:43:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/10/2011	5:05:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	5:05:54 PM	Recipe started at 5:05 PM
5/10/2011	5:05:54 PM	H2 valve closed
5/10/2011	5:05:54 PM	BCl3 valve closed
5/10/2011	5:05:54 PM	PH3 valve closed
5/10/2011	5:05:54 PM	SiCl4 pre valve closed
5/10/2011	5:05:54 PM	SiCl4 post valve closed
5/10/2011	5:05:54 PM	Main Vac valve closed
5/10/2011	5:05:54 PM	Bypass valve closed
5/10/2011	5:05:54 PM	Bubbler valve closed
5/10/2011	5:05:54 PM	Helium valve opened
5/10/2011	5:05:54 PM	Helium MFC set to  500.000000
5/10/2011	5:05:54 PM	H2 MFC set to  0.000000
5/10/2011	5:05:54 PM	BCl3 MFC set to  0.000000
5/10/2011	5:05:54 PM	PHl3 MFC set to  0.000000
5/10/2011	5:05:54 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:05:54 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:05:54 PM	Tube furnace set to 0
5/10/2011	5:06:13 PM	Helium valve closed
5/10/2011	5:06:13 PM	H2 valve closed
5/10/2011	5:06:13 PM	BCl3 valve closed
5/10/2011	5:06:13 PM	PH3 valve closed
5/10/2011	5:06:13 PM	SiCl4 pre valve closed
5/10/2011	5:06:13 PM	SiCl4 post valve closed
5/10/2011	5:06:13 PM	Main Vac valve closed
5/10/2011	5:06:13 PM	Bypass valve closed
5/10/2011	5:06:13 PM	Bubbler valve closed
5/10/2011	5:06:13 PM	Helium MFC set to  0.000000
5/10/2011	5:06:13 PM	H2 MFC set to  0.000000
5/10/2011	5:06:13 PM	BCl3 MFC set to  0.000000
5/10/2011	5:06:13 PM	PHl3 MFC set to  0.000000
5/10/2011	5:06:13 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:06:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:06:13 PM	Tube furnace set to 0
5/10/2011	5:06:13 PM	Run finished at 5:06 PM
5/10/2011	5:06:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	5:06:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	5:06:15 PM	Recipe started at 5:06 PM
5/10/2011	5:06:15 PM	Helium valve closed
5/10/2011	5:06:15 PM	H2 valve closed
5/10/2011	5:06:15 PM	BCl3 valve closed
5/10/2011	5:06:15 PM	PH3 valve closed
5/10/2011	5:06:15 PM	SiCl4 pre valve closed
5/10/2011	5:06:15 PM	SiCl4 post valve closed
5/10/2011	5:06:15 PM	Main Vac valve closed
5/10/2011	5:06:15 PM	Bubbler valve closed
5/10/2011	5:06:15 PM	Bypass valve opened
5/10/2011	5:06:15 PM	Helium MFC set to  0.000000
5/10/2011	5:06:15 PM	H2 MFC set to  0.000000
5/10/2011	5:06:15 PM	BCl3 MFC set to  0.000000
5/10/2011	5:06:15 PM	PHl3 MFC set to  0.000000
5/10/2011	5:06:15 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:06:15 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:06:15 PM	Tube furnace set to 0
5/10/2011	5:06:29 PM	Helium valve closed
5/10/2011	5:06:29 PM	H2 valve closed
5/10/2011	5:06:29 PM	BCl3 valve closed
5/10/2011	5:06:29 PM	PH3 valve closed
5/10/2011	5:06:29 PM	SiCl4 pre valve closed
5/10/2011	5:06:29 PM	SiCl4 post valve closed
5/10/2011	5:06:29 PM	Bubbler valve closed
5/10/2011	5:06:29 PM	Main Vac valve opened
5/10/2011	5:06:29 PM	Bypass valve opened
5/10/2011	5:06:29 PM	Helium MFC set to  0.000000
5/10/2011	5:06:29 PM	H2 MFC set to  0.000000
5/10/2011	5:06:29 PM	BCl3 MFC set to  0.000000
5/10/2011	5:06:29 PM	PHl3 MFC set to  0.000000
5/10/2011	5:06:29 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:06:29 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:06:30 PM	Tube furnace set to 0
5/10/2011	5:06:30 PM	Run finished at 5:06 PM
5/10/2011	5:06:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	5:07:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	5:07:50 PM	Recipe started at 5:07 PM
5/10/2011	5:07:50 PM	H2 valve closed
5/10/2011	5:07:50 PM	BCl3 valve closed
5/10/2011	5:07:50 PM	PH3 valve closed
5/10/2011	5:07:50 PM	SiCl4 pre valve closed
5/10/2011	5:07:50 PM	SiCl4 post valve closed
5/10/2011	5:07:50 PM	Main Vac valve closed
5/10/2011	5:07:50 PM	Bypass valve closed
5/10/2011	5:07:50 PM	Bubbler valve closed
5/10/2011	5:07:51 PM	Helium valve opened
5/10/2011	5:07:51 PM	Helium MFC set to  500.000000
5/10/2011	5:07:51 PM	H2 MFC set to  0.000000
5/10/2011	5:07:51 PM	BCl3 MFC set to  0.000000
5/10/2011	5:07:51 PM	PHl3 MFC set to  0.000000
5/10/2011	5:07:51 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:07:51 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:07:51 PM	Tube furnace set to 0
5/10/2011	5:08:13 PM	Helium valve closed
5/10/2011	5:08:13 PM	H2 valve closed
5/10/2011	5:08:13 PM	BCl3 valve closed
5/10/2011	5:08:13 PM	PH3 valve closed
5/10/2011	5:08:13 PM	SiCl4 pre valve closed
5/10/2011	5:08:13 PM	SiCl4 post valve closed
5/10/2011	5:08:13 PM	Main Vac valve closed
5/10/2011	5:08:13 PM	Bypass valve closed
5/10/2011	5:08:13 PM	Bubbler valve closed
5/10/2011	5:08:13 PM	Helium MFC set to  0.000000
5/10/2011	5:08:13 PM	H2 MFC set to  0.000000
5/10/2011	5:08:13 PM	BCl3 MFC set to  0.000000
5/10/2011	5:08:13 PM	PHl3 MFC set to  0.000000
5/10/2011	5:08:13 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:08:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:08:14 PM	Tube furnace set to 0
5/10/2011	5:08:14 PM	Run finished at 5:08 PM
5/10/2011	5:08:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	5:08:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	5:08:15 PM	Recipe started at 5:08 PM
5/10/2011	5:08:15 PM	Helium valve closed
5/10/2011	5:08:15 PM	H2 valve closed
5/10/2011	5:08:15 PM	BCl3 valve closed
5/10/2011	5:08:15 PM	PH3 valve closed
5/10/2011	5:08:15 PM	SiCl4 pre valve closed
5/10/2011	5:08:15 PM	SiCl4 post valve closed
5/10/2011	5:08:15 PM	Main Vac valve closed
5/10/2011	5:08:15 PM	Bubbler valve closed
5/10/2011	5:08:15 PM	Bypass valve opened
5/10/2011	5:08:15 PM	Helium MFC set to  0.000000
5/10/2011	5:08:15 PM	H2 MFC set to  0.000000
5/10/2011	5:08:15 PM	BCl3 MFC set to  0.000000
5/10/2011	5:08:15 PM	PHl3 MFC set to  0.000000
5/10/2011	5:08:15 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:08:15 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:08:15 PM	Tube furnace set to 0
5/10/2011	5:08:31 PM	Helium valve closed
5/10/2011	5:08:31 PM	H2 valve closed
5/10/2011	5:08:31 PM	BCl3 valve closed
5/10/2011	5:08:31 PM	PH3 valve closed
5/10/2011	5:08:31 PM	SiCl4 pre valve closed
5/10/2011	5:08:31 PM	SiCl4 post valve closed
5/10/2011	5:08:31 PM	Bubbler valve closed
5/10/2011	5:08:31 PM	Main Vac valve opened
5/10/2011	5:08:31 PM	Bypass valve opened
5/10/2011	5:08:31 PM	Helium MFC set to  0.000000
5/10/2011	5:08:31 PM	H2 MFC set to  0.000000
5/10/2011	5:08:31 PM	BCl3 MFC set to  0.000000
5/10/2011	5:08:31 PM	PHl3 MFC set to  0.000000
5/10/2011	5:08:31 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:08:31 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:08:31 PM	Tube furnace set to 0
5/10/2011	5:08:31 PM	Run finished at 5:08 PM
5/10/2011	5:08:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	5:55:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	5:55:21 PM	Recipe started at 5:55 PM
5/10/2011	5:55:21 PM	H2 valve closed
5/10/2011	5:55:21 PM	BCl3 valve closed
5/10/2011	5:55:21 PM	PH3 valve closed
5/10/2011	5:55:21 PM	SiCl4 pre valve closed
5/10/2011	5:55:21 PM	SiCl4 post valve closed
5/10/2011	5:55:21 PM	Main Vac valve closed
5/10/2011	5:55:21 PM	Bypass valve closed
5/10/2011	5:55:21 PM	Bubbler valve closed
5/10/2011	5:55:21 PM	Helium valve opened
5/10/2011	5:55:21 PM	Helium MFC set to  500.000000
5/10/2011	5:55:21 PM	H2 MFC set to  0.000000
5/10/2011	5:55:21 PM	BCl3 MFC set to  0.000000
5/10/2011	5:55:21 PM	PHl3 MFC set to  0.000000
5/10/2011	5:55:21 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:55:21 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:55:21 PM	Tube furnace set to 0
5/10/2011	5:56:41 PM	Helium valve closed
5/10/2011	5:56:41 PM	H2 valve closed
5/10/2011	5:56:41 PM	BCl3 valve closed
5/10/2011	5:56:41 PM	PH3 valve closed
5/10/2011	5:56:41 PM	SiCl4 pre valve closed
5/10/2011	5:56:41 PM	SiCl4 post valve closed
5/10/2011	5:56:41 PM	Main Vac valve closed
5/10/2011	5:56:41 PM	Bypass valve closed
5/10/2011	5:56:41 PM	Bubbler valve closed
5/10/2011	5:56:41 PM	Helium MFC set to  0.000000
5/10/2011	5:56:41 PM	H2 MFC set to  0.000000
5/10/2011	5:56:41 PM	BCl3 MFC set to  0.000000
5/10/2011	5:56:41 PM	PHl3 MFC set to  0.000000
5/10/2011	5:56:41 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:56:41 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:56:41 PM	Tube furnace set to 0
5/10/2011	5:56:42 PM	Run finished at 5:56 PM
5/10/2011	5:56:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2011	5:56:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2011	5:56:56 PM	Recipe started at 5:56 PM
5/10/2011	5:56:56 PM	Helium valve closed
5/10/2011	5:56:56 PM	H2 valve closed
5/10/2011	5:56:56 PM	BCl3 valve closed
5/10/2011	5:56:56 PM	PH3 valve closed
5/10/2011	5:56:56 PM	SiCl4 pre valve closed
5/10/2011	5:56:56 PM	SiCl4 post valve closed
5/10/2011	5:56:56 PM	Main Vac valve closed
5/10/2011	5:56:56 PM	Bubbler valve closed
5/10/2011	5:56:56 PM	Bypass valve opened
5/10/2011	5:56:56 PM	Helium MFC set to  0.000000
5/10/2011	5:56:56 PM	H2 MFC set to  0.000000
5/10/2011	5:56:56 PM	BCl3 MFC set to  0.000000
5/10/2011	5:56:56 PM	PHl3 MFC set to  0.000000
5/10/2011	5:56:56 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:56:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:56:56 PM	Tube furnace set to 0
5/10/2011	5:57:19 PM	Helium valve closed
5/10/2011	5:57:19 PM	H2 valve closed
5/10/2011	5:57:19 PM	BCl3 valve closed
5/10/2011	5:57:19 PM	PH3 valve closed
5/10/2011	5:57:19 PM	SiCl4 pre valve closed
5/10/2011	5:57:19 PM	SiCl4 post valve closed
5/10/2011	5:57:19 PM	Bubbler valve closed
5/10/2011	5:57:19 PM	Main Vac valve opened
5/10/2011	5:57:19 PM	Bypass valve opened
5/10/2011	5:57:19 PM	Helium MFC set to  0.000000
5/10/2011	5:57:19 PM	H2 MFC set to  0.000000
5/10/2011	5:57:19 PM	BCl3 MFC set to  0.000000
5/10/2011	5:57:19 PM	PHl3 MFC set to  0.000000
5/10/2011	5:57:19 PM	SiCl4 MFC set to  0.000000
5/10/2011	5:57:19 PM	Bypass solenoid MFC set to  0.000000
5/10/2011	5:57:19 PM	Tube furnace set to 0
5/10/2011	5:57:20 PM	Run finished at 5:57 PM
5/10/2011	5:57:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
